Distributed IO Control Ring Architecture for Semiconductor Mainframes
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Solution Overview
Problem
Current input/output (IO) control architectures for next-generation mainframes are limited in supporting a high density of process chambers and lack flexibility in chamber positioning, leading to excessive use of long and expensive IO control wires and clean dry air supply lines, which occupy significant space and increase costs.
Innovation Solution
A distributed IO control and interlock ring architecture that utilizes a programmable logic control (PLC) module with an IO network bus and chamber interface IO sub-modules to convert interlock relay signals into digital signals, transmit them over the network, and control slit valves and pneumatics, allowing for modular and flexible attachment of process chambers without the need for extensive cabling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If current centralized IO control architecture is used, then control signals can be transmitted to process chambers, but the number of supported process chambers is limited and excessive cabling is required
Solution Approach 1:
The patent divides the centralized IO control system into distributed IO control modules, with each module responsible for controlling a specific process chamber. This segmentation eliminates the need for extensive cabling from a central controller to each chamber, as each chamber has its own dedicated control module that can be independently managed.
Solution Approach 2:
The patent introduces an intermediary IO control module positioned between the mainframe controller and each process chamber. This intermediary module receives control signals from the mainframe and translates them into chamber-specific control actions, enabling flexible chamber attachment without requiring direct cabling from the mainframe to each chamber.
2Reliability
If IO control cables are extended to all facets regardless of chamber attachment, then control coverage is maximized, but cable length and cost increase significantly
Solution Approach 1:
The patent implements a dynamic cabling approach where IO control modules are selectively attached to mainframe facets based on chamber presence. Instead of permanent cabling to all facets, the system dynamically configures connections only where needed, reducing cable length and cost while maintaining control coverage for attached chambers.
Solution Approach 2:
The patent applies local quality by providing IO control capability only at facets where process chambers are actually attached. Each facet receives control resources proportional to its actual usage, eliminating the waste of extending cables and providing control infrastructure to facets that do not require it.
3Measurement precision
If high density discrete interlock and IO signals are distributed to platform modules, then control precision is maintained, but space occupation and cost increase
Solution Approach 1:
The patent merges multiple discrete interlock and IO signals into a consolidated communication protocol transmitted over a single network bus. Instead of distributing separate cables for each control signal, the system combines these signals into digital packets that travel through a unified network infrastructure, reducing space occupation while maintaining signal precision through protocol-based data integrity.
Data Source
AI summary
A system includes a programmable logic control (PLC) module, an input/output (IO) network bus coupled to the PLC module and provided at facets of a mainframe. A first process chamber attached to a first facet of the facets. A chamber interface IO sub-module is attached to the first facet and coupled to the IO network bus and to a process chamber IO controller of the first process chamber. The chamber interface IO sub-module is to: convert interlock relay signals, received via dry contact exchange with the process chamber IO controller, to digital signals; combine the digital signals into network packets adapted for communication using a protocol of the IO network bus; and transmit the network packets to the PLC module over the IO network bus.