Vacuum Leak Detection Using Distributed Pump Volume

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Solution Overview

Problem

Existing vacuum leak detection systems are costly and inefficient due to the need for high vacuum pumps and turbomolecular pumps, which result in slow and non-reproducible gas transport and detection.

Innovation Solution

A test chamber with multiple evenly distributed vacuum connections connected to a common pump volume, allowing for faster gas transport and detection using simpler and less expensive vacuum pumps like diaphragm, scroll, or rotary vane pumps.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stress or pressure

If high vacuum pumps and turbomolecular pumps are used, then vacuum pressure is reduced, but gas transport becomes slow and non-reproducible

Engineering Contradiction:
Improvevacuum pressureVSAvoidgas transport speed
Core Design Contradiction:
Stress or pressureVSSpeed

Solution Approach 1:

The test chamber is divided into two distinct volumes: a test volume where the specimen is located and a pump volume where vacuum pumping occurs. Multiple vacuum connections distribute the pumping action across the test volume, creating localized pressure gradients that accelerate gas transport while maintaining overall vacuum conditions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different pressure conditions are created in different regions of the test chamber. The pump volume maintains lower pressure to drive gas flow, while the test volume maintains higher pressure to preserve the test atmosphere. This local pressure differentiation enables fast gas transport through the vacuum connections without compromising the overall vacuum environment.

Inventive Principle:
Principle #3Local quality

2Stress or pressure

If high vacuum pumps and turbomolecular pumps are used, then vacuum pressure is reduced, but system cost increases

Engineering Contradiction:
Improvevacuum pressureVSAvoidsystem cost
Core Design Contradiction:
Stress or pressureVSEase of manufacture

Solution Approach 1:

The invention replaces expensive, complex turbomolecular pumps with simpler, more affordable vacuum pumps such as diaphragm pumps, scroll pumps, or rotary vane pumps. These pumps, while individually less capable, achieve the same functional result when used in multiple instances across the distributed vacuum connections.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

Multiple simple vacuum pumps work together in parallel through the distributed vacuum connections to achieve the collective performance needed for fast gas transport. The combined effect of multiple pumps creates sufficient pressure differential and gas flow velocity without requiring any single pump to be overly complex or expensive.

Inventive Principle:
Principle #5Merging (Combining)

3Device complexity

If a single vacuum connection is used, then device complexity is reduced, but detection time increases and reproducibility decreases

Engineering Contradiction:
Improvevacuum connection configurationVSAvoiddetection time
Core Design Contradiction:
Device complexityVSLoss of time

Solution Approach 1:

The single vacuum connection is segmented into multiple distributed vacuum connections across the test chamber walls. This segmentation reduces the average distance test gas must travel to reach a vacuum connection, thereby reducing detection time and improving reproducibility regardless of leak position.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The vacuum connections are distributed across multiple surfaces (walls, bottom, lid) of the test chamber, transforming a one-point vacuum extraction into a multi-point distributed system. This spatial distribution creates multiple escape routes for test gas, reducing travel distance and time.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enables fast and reproducible detection of test gas leaks by accelerating gas flow through the vacuum connections, reducing detection time and variance, and lowering operational costs.

Implementation Method 1

a lower vacuum pressure is formed in the pump volume than in the test chamber when the test chamber is evacuated with the vacuum pump

Methodology Applied
Scientific EffectPressure gradient: Pressure Gradient

Implementation Method 2

the common pump volume causes the flow velocity of the pumped gas to be higher than within the test chamber

Methodology Applied
Scientific EffectGas flow:

Implementation Method 3

the diffusion speed of the gases is sufficiently high, so that the test gas escaping from the test specimen reaches the sensor system of the gas detector without any significant time delay

Methodology Applied
Scientific EffectDiffusion: Diffusion

Data Source

PatentUS20250130133A1Leak detection in a viscous flow
Publication Date: 2025.04.24 INFICON GMBH
  • US20250130133A1 patent drawing

AI summary

The invention relates to a device for vacuum leak detection, comprising a vacuum pump (18), a test chamber (12) which is designed to accommodate the test specimen and can be evacuated by means of the vacuum pump (18), and a gas detector (16) which detects the gas evacuated from the test chamber (12) by means of the vacuum pump (18), wherein the test chamber (12) has a plurality of vacuum connections (26) provided with the vacuum pump (18) in order to evacuate the test chamber (12), characterized in that a common pump volume (28) which is connected to the vacuum connections (26) is fluidically provided between the vacuum connections (26) and the vacuum pump (18) and is evacuated by means of the vacuum pump (18).