Distributed Spacing Compensation for Workpiece Surface Matching
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Solution Overview
Problem
The uneven surfaces of machined workpieces, such as wafers, result in inconsistent spacing with machining workpieces, leading to inaccurate measurement or machining due to parts being in contact or spaced too far apart, which existing flattening methods fail to address.
Innovation Solution
An operating device with a control system, spacing compensation units, and sensors divides the lower surface of the operating workpiece into portions, adjusting distances to match the shape of the measured workpiece, using piezoelectric, thermal expansion, or flat capacitors to ensure consistent spacing across the surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the surface of the machined workpiece is flattened to conform with the flat entire surface of the machining workpiece, then the spacing consistency is improved, but the manufacturing complexity increases and the surface of the machined workpiece may be damaged
Solution Approach 1:
The patent introduces a support layer with multiple independently adjustable support points beneath the machining workpiece. Each support point can be adjusted individually to compensate for surface unevenness, dividing the compensation function into multiple segments rather than requiring global surface flattening. This reduces processing complexity while maintaining spacing consistency.
Solution Approach 2:
The patent introduces a support layer as an intermediary component between the machining workpiece and the base. This support layer acts as a mediator that compensates for surface unevenness through adjustable support points, avoiding direct modification of the machined workpiece surface and eliminating the need for complex flattening operations.
2Measurement precision
If the spacing between the machining workpiece and machined workpiece is reduced to a few tens of nanometers, then the measurement and machining accuracy is improved, but the sensitivity to surface unevenness increases
Solution Approach 1:
The patent employs a support layer with adjustable support points that can dynamically adapt to surface unevenness. The adjustability allows the system to maintain optimal spacing uniformity across the entire workpiece surface, enabling the use of very small spacing distances for high-precision measurement and machining operations.
Solution Approach 2:
The patent changes the parameter of support height at different locations to compensate for surface unevenness. By adjusting the height parameters of individual support points, the system maintains uniform spacing between the machining workpiece and machined workpiece, enabling high-precision operations at nanometer-scale distances.
3Productivity
If the entire surface of the machining workpiece is used for measurement or machining operations, then the productivity is improved, but the requirement for surface flatness and spacing consistency becomes more stringent
Solution Approach 1:
The patent segments the support function into multiple independently adjustable support points distributed across the entire surface. This segmentation allows each region to be independently compensated for surface unevenness, enabling full-surface operations with maintained spacing consistency and high productivity.
Solution Approach 2:
The support layer serves multiple functions: it provides mechanical support, compensates for surface unevenness, and enables full-surface operations. This multi-functionality allows the entire surface of the machining workpiece to be used for measurement and machining while maintaining spacing consistency, thereby improving productivity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method improves the accuracy of measuring and machining operations by maintaining consistent spacing between workpieces, facilitating precise alignment and operation.
Implementation Method 1
said spacing compensation unit comprises a piezoelectric element
Implementation Method 2
said spacing compensation unit comprises a thermal expansion element
Data Source
AI summary
An operating device and a method for distributed compensating a spacing between two workpieces, relating to the fields of measurement and control technology and precision manufacturing technology are disclosed. The operating device comprises: a control system, at least one spacing compensation unit, a first support layer, an operating workpiece, and a plurality of sensors; the sensors are used to measure a distance between the operating workpiece and a corresponding position on a surface to be operated of the measured workpiece; the control system is used to control the spacing compensation units to adjust the distances between a corresponding target portion on the operating workpiece and the measured workpiece based on the distances measured by the sensors, so as to make the shapes of two opposite surfaces between the operating workpiece and the measured workpiece matched; the target portion is the portion of the operating workpiece overlapped with the spacing compensation unit.