Division Mask Fabrication for OLED Deposition
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Solution Overview
Problem
Large substrates in OLED display manufacturing face challenges with deposition mask deflection due to lack of rigidity, leading to non-uniform organic thin film deposition and potential degradation in display device performance.
Innovation Solution
A method of manufacturing a division mask involves stretching and fastening the mask member to form a pattern with longer central openings, which are then cut to detach from the fastening portion, minimizing deflection by using materials like stainless steel or nickel alloys and forming patterns with specific shapes to maintain tension and reduce deformation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the substrate size is increased to achieve larger display areas, then the deposition mask experiences deflection due to reduced rigidity, but larger substrates are needed for next-generation display devices
Solution Approach 1:
The patent divides the deposition mask into multiple separate mask members (first mask member, second mask member, etc.) arranged in an array. Each mask member is independently supported on the substrate, preventing deflection while covering large substrate areas. This segmentation allows the mask system to maintain rigidity across large display areas by avoiding single large-span structures.
2Stability of the object's composition
If the mask member is stretched to minimize deflection, then the opening shape deviates from the designed pattern, but uniform deposition requires accurate pattern fidelity
Solution Approach 1:
The patent applies preliminary stretching to the mask members during the deposition process to minimize deflection, then performs a compensation step after deposition where the mask is returned to its original state. This preliminary action allows the mask to maintain stability during deposition while enabling subsequent restoration of the original pattern geometry, ensuring manufacturing precision is achieved through the compensation process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach minimizes the difference between designed and manufactured opening shapes, reducing mask deflection and ensuring uniform organic thin film deposition, thereby enhancing the reliability and precision of OLED display devices.
Implementation Method 1
forming a first pattern portion having a plurality of first openings on the mask member; and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion
Implementation Method 2
The organic thin film may be formed by a deposition process using a deposition mask
Data Source
AI summary
A method of manufacturing a division mask includes pulling opposite end portions of a mask member in a first direction to fasten the mask member to a fastening portion, forming a first pattern portion having a plurality of first openings on the fastened mask member, such that the first pattern portion has a longer length in the first direction toward a central portion of the first pattern portion, and cutting the opposite end portions of the mask member to detach the mask member from the fastening portion.