Diamond-like Carbon Coating with Alternating Fluorine Layers

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Solution Overview

Problem

Diamond-like carbon coatings doped with fluorine exhibit improved antifriction properties but have a short service life due to wear, necessitating a solution that maintains high hardness and antifriction behavior while extending the coating's lifespan.

Innovation Solution

A coating composed of alternating layers of diamond-like carbon films with varying fluorine content, where films with higher and lower fluorine portions are alternately deposited, reducing wear and enhancing the coating's durability, with specific fluorine concentrations between 0.5 at% to 1 at% and film thicknesses ranging from 1 nm to 100 nm, and incorporating a wave-like surface structure to optimize surface properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If diamond-like carbon coatings are doped with fluorine to improve antifriction properties, then friction coefficient is reduced, but service life is shortened due to increased wear

Engineering Contradiction:
Improvefriction coefficientVSAvoidservice life
Core Design Contradiction:
Object-generated harmful factorsVSDuration of action of moving object

Solution Approach 1:

The coating is segmented into alternating layers: fluorine-doped diamond-like carbon layers (providing low friction) and undoped or low-fluorine diamond-like carbon layers (providing high wear resistance). This segmentation allows each layer type to perform its specialized function, resolving the contradiction between reducing friction and extending service life.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention creates a composite coating structure combining two different diamond-like carbon materials with complementary properties: fluorine-doped DLC for antifriction performance and undoped/low-fluorine DLC for hardness and wear resistance. The composite structure synergistically combines these properties to achieve both low friction and extended service life.

Inventive Principle:
Principle #40Composite materials

2Reliability

If multiple chemical elements (Si, O, F, H) are added to modify film properties, then antifriction behavior is improved, but process management complexity increases

Engineering Contradiction:
Improveantifriction behaviorVSAvoidprocess management complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The complex multi-element doping is segmented into separate processing steps: first depositing undoped or low-fluorine DLC layers, then alternating with fluorine-doped DLC layers. This segmentation simplifies process management by treating different doping scenarios as separate, manageable deposition cycles rather than attempting to control multiple elements simultaneously in a single layer.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different chemical compositions are applied locally to different layers: fluorine doping is concentrated in specific alternating layers where it is most beneficial for friction reduction, while other layers maintain simpler compositions optimized for wear resistance. This local quality approach simplifies overall process management by applying complexity only where needed.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The alternating fluorine content and structure improve the coating's hardness, strength, and service life, maintaining low friction coefficients over a longer period and combining the benefits of pure and fluorine-doped diamond-like carbon films, while simplifying the manufacturing process and ensuring precise fluorine control.

Implementation Method 1

Coating based on diamond-like carbon

Methodology Applied
Scientific EffectDiamond-like carbon: Diamond-like Carbon

Implementation Method 2

the antifriction behavior of such films can be improved by doping with fluorine since this positively influences the surface properties

Methodology Applied
Scientific EffectFluorine doping: Dopants

Data Source

PatentUS8911868B2Coating based on diamond-like carbon
Publication Date: 2014.12.16 FRAUNHOFER USA INC
  • US8911868B2 patent drawing
  • US8911868B2 patent drawing
  • US8911868B2 patent drawing

AI summary

A coating based on diamond-like is formed from a plurality of films of diamond-like carbon formed alternatingly over one another and in this respect a film in which no portion or only a much lower portion of doped fluorine is contained. A film in which fluorine or at least fluorine with a higher portion than the film arranged thereunder or thereabove are formed alternatingly over one another. The coating could be manufactured by using a target of pure carbon. Films are deposited on a surface of a substrate by means of a PVD process, with the portion of fluorine contained in doped form. Films are formed alternately being varied by varying a supplied volume flow of a fluorine/carbon compound or sulfur/fluorine compound as a precursor.