DLC-Coated End Effector for Low-Particle Substrate Handling
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Solution Overview
Problem
Existing end effectors in semiconductor fabrication tools suffer from limited lifetime and generate particles due to wear, which affects substrate quality and introduces mechanical defects, especially under high temperatures and low vacuum conditions.
Innovation Solution
The end effector is designed with diamond-like carbon (DLC) coatings on supporting projections and a one-piece or removable construction, using materials with low thermal expansion coefficients, ensuring durability and reducing particle generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-generated harmful factors
If traditional end effector materials (quartz or ceramic) are used, then particle generation is reduced, but lifetime is limited and they must be replaced at regular intervals
Solution Approach 1:
The end effector employs a composite construction with a metal body (providing mechanical strength and longevity) and diamond-like carbon (DLC) coating on contact surfaces (providing low particle generation). This combines the advantages of different materials to simultaneously achieve long lifetime and low particle generation.
Solution Approach 2:
The invention changes the surface properties of the end effector by applying DLC coating, which has superior wear resistance and low particle generation characteristics compared to traditional quartz or ceramic materials, while maintaining the structural integrity through the metal body.
2Object-generated harmful factors
If single piece machined specialty materials are used, then particle control is improved, but manufacturing cost increases due to costly machining of quartz or ceramic
Solution Approach 1:
The composite structure allows the use of easily machinable metal for the body while applying DLC coating to achieve the particle control properties of specialty materials, significantly reducing manufacturing cost compared to machining entire end effectors from quartz or ceramic.
Solution Approach 2:
The DLC coating is applied specifically to the contact surfaces where particle generation occurs, rather than requiring the entire end effector to be made of expensive specialty materials, thus achieving particle control at lower cost.
3Duration of action of moving object
If two-piece construction end effector with removable pads is used, then lifetime is improved, but particle generation increases due to particle sources at interfaces and thermal expansion mismatch
Solution Approach 1:
The end effector separates the structural function (metal body providing mechanical strength and longevity) from the contact function (DLC-coated surfaces providing low particle generation), combining the advantages of both single-piece and multi-piece designs while eliminating their respective disadvantages.
Solution Approach 2:
The DLC coating creates a homogeneous surface layer on the metal body, eliminating the material interface between dissimilar materials that causes particle generation and thermal expansion mismatch in two-piece constructions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The DLC-coated end effector enhances lifetime and minimizes particle contamination, improving substrate quality and reducing maintenance costs in semiconductor fabrication tools.
Implementation Method 1
The end effector is provided with wear-resistant coatings
Implementation Method 2
at least one supporting projection is provided with a diamond-like carbon (DLC) coating
Implementation Method 3
the potential mismatch of the thermal expansion coefficient of the different materials
Data Source
AI summary
An end effector for a substrate handling device suitable for a semiconductor fabrication tool. The end effector is adapted to support the substrate and is connectable to a robotic arm. The end effector includes: (a) a body having a top surface and a bottom surface; and (b) at least one supporting projection protruding from the top surface of the body for contacting and supporting the substrate. The supporting projection is provided with a diamond-like carbon coating.