Digital Light Processor Imaging Ellipsometer with Scheimpflug Optics
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing imaging ellipsometer and polarimeter systems lack efficient methods to process and image electromagnetic radiation reflecting from multiple regions of a sample, particularly in systems using multiple detector elements like CCDs, which limits their ability to provide detailed and focused images.
Innovation Solution
The application of Digital Light Processors (DLPs) with an array of controllable microscopic mirrors to image and direct electromagnetic radiation from multiple regions of a sample onto a single detector element, while maintaining the Scheimpflug condition for focused imaging, allowing for sequential monitoring and interpretation of images from different locations on the sample surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If multiple detector elements (such as CCDs) are used to image electromagnetic radiation from different sample regions, then imaging coverage is improved, but device complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the imaging function into two separate components: a single detector element that remains stationary, and a Digital Light Processor (DLP) that sequentially directs light from different sample regions to the detector. This segmentation allows the system to achieve multi-region imaging coverage without requiring multiple detector elements, thereby reducing device complexity while maintaining imaging coverage.
Solution Approach 2:
The patent introduces a Digital Light Processor (DLP) as an intermediary device between the sample and the single detector element. The DLP acts as a mediator that dynamically redirects electromagnetic radiation from multiple sample regions to the single detector in sequence, enabling the detector to capture information from different locations without physically moving or multiplying detector elements.
2Device complexity
If a single detector element is used to monitor sequential images from multiple sample regions, then device complexity is reduced, but imaging speed decreases
Solution Approach 1:
The patent employs periodic action through the rapid sequential switching of the Digital Light Processor (DLP) micro-mirrors, which periodically redirect light from different sample regions to the single detector element. This high-speed periodic switching creates the perception of simultaneous multi-region imaging, thereby maintaining imaging speed and productivity despite using only a single detector element.
3Measurement precision
If Digital Light Processor is introduced to direct light sequentially, then device complexity increases, but imaging precision is improved
Solution Approach 1:
The patent applies the copying principle by using the Digital Light Processor to create sequential optical copies of different sample regions and directing them to a single detector element. Each micro-mirror in the DLP acts as a copying mechanism that captures light from a specific sample location and reproduces it at the detector plane, enabling precise imaging of multiple regions through sequential copying rather than simultaneous detection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient imaging and analysis of electromagnetic radiation from multiple sample regions using a single detector element, providing a sequential output that can be interpreted as images of different locations, thereby improving the imaging capabilities of systems like ellipsometers and polarimeters without the need for multiple detector elements.
Implementation Method 1
Digital Light Processors (DLPs) with an array of controllable microscopic mirrors to image and direct electromagnetic radiation
Implementation Method 2
a first focusing means for focusing electromagnetic radiation reflecting from the sample; a second focusing means for focusing electromagnetic radiation provided thereto from the at least one microscopic mirror onto the at least one detector element
Data Source
AI summary
Application of digital light processor (DLP) systems in an imaging ellipsometer or imaging polarimeter with a focusing means, sample and detector arranged to meet the Scheimpflug condition.