Digital Mirror Device Light Delivery Sequence Optimization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current lithographic processes face challenges in accurately delivering light patterns to substrates due to the influence of electrical charges from stored instructions on digital mirror devices, leading to deviations in light beam positioning and reduced precision in feature formation, especially at the nanometer scale.
Innovation Solution
The method involves determining a sequence of light intensities for a digital mirror device that includes intervals with no light delivery, stored in physical memory, to reduce the impact of upcoming instructions and adjust the center of gravity of the light spot, allowing for precise targeting and improved alignment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If instructions for light delivery are stored in physical memory near the digital mirror device, then the system can operate with reduced latency and improved speed, but electrical charges from the stored instructions cause deviations in light beam positioning and reduce manufacturing precision
Solution Approach 1:
The patent introduces a compensatory mechanism that acts as an intermediary between the stored instructions and the light delivery process. By calculating and applying compensation values based on the stored instruction patterns, the system mediates the harmful electrostatic effects while preserving the performance benefits of nearby memory storage.
Solution Approach 2:
The system implements a feedback loop where the actual light beam position is monitored and compared against the intended position. Compensation values are calculated based on the stored instruction patterns and applied in real-time to correct deviations, ensuring continuous precision despite the presence of electrical charges from nearby memory.
2Productivity
If the digital mirror device operates at high speed with continuous light delivery, then productivity is improved, but the influence of upcoming instructions stored in physical memory causes deviations and reduces reliability
Solution Approach 1:
The system performs preliminary calculations of compensation values based on the known patterns of stored instructions before they affect the light delivery. By anticipating the electrostatic disturbances from upcoming memory operations, the system can pre-compensate for these effects, maintaining reliability during high-speed continuous operation.
3Speed
If instructions are stored closer to the digital mirror device to reduce latency, then speed is improved, but the electrical charges from these instructions increase and cause greater deviations in light positioning
Solution Approach 1:
The patent converts the harmful electrical charges from the nearby memory storage into useful information. By monitoring and calculating compensation values based on the stored instruction patterns, the system transforms the previously harmful electrostatic interference into a predictable, compensatable effect that can be corrected in real-time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the accuracy of light delivery and pattern formation on substrates by mitigating the 'next pattern effect,' resulting in improved precision and reduced deviations, thereby increasing the effectiveness of lithographic processes.
Implementation Method 1
delivering light to a substrate by a light source utilizing a digital mirror device (DMD)
Data Source
AI summary
A method for improved sequencing of light delivery in a lithographic process includes determining a sequence of intensities of light to be delivered that includes an interval within the sequence of intensities where substantially no light is delivered to the substrate and delivering light to a substrate by a light source utilizing a digital mirror device (DMD) according to the sequence of intensities.