DMD Assembly Polarization Beam Splitting for High Resolution Imaging

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Solution Overview

Problem

Current photolithography methods for creating patterns on large area substrates, such as those used in LCD manufacturing, are inefficient and costly, failing to precisely and effectively produce images with high pixel density.

Innovation Solution

A method utilizing a multiple digital micromirror device (DMD) assembly that splits a single beam of light into s-polarization and p-polarization beams, reflecting them through the assembly to produce a plurality of superimposed images on the substrate, effectively doubling the number of pixels compared to conventional systems.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional photolithography methods are used to create patterns on large area substrates, then the manufacturing process is simple, but the image resolution and pixel density are insufficient

Engineering Contradiction:
Improveimage resolutionVSAvoidsystem complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent divides a single DMD into multiple separate DMDs (first DMD and second DMD) that operate independently. Each DMD processes a specific polarization component (s-polarization and p-polarization respectively), allowing the system to generate multiple separate image sets that can be superimposed to achieve higher resolution while maintaining manageable device complexity through modular architecture

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces a new dimension by utilizing polarization states of light (s-polarization and p-polarization) as an additional degree of freedom. By separating and processing different polarization components through separate DMDs and then recombining them, the system achieves increased image resolution without simply adding more DMDs in the traditional sense, thus managing complexity while improving precision

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Quantity of substance

If multiple separate image projection devices are used to increase pixel count, then the number of pixels doubles, but the cost and device complexity increase significantly

Engineering Contradiction:
Improvenumber of pixelsVSAvoidnumber of projection devices
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent segments the single DMD into multiple functional units (first DMD for s-polarization, second DMD for p-polarization) that can be independently controlled. This segmentation allows each DMD to handle a specific portion of the image formation process, effectively doubling the pixel capacity while using separate, manageable components rather than requiring a single complex high-resolution DMD

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent makes the polarization beam splitting cube a multi-functional element that serves multiple purposes: it separates s-polarization and p-polarization beams for independent processing, and later recombines them to form the final high-resolution image. This multi-functionality reduces the need for additional dedicated components, managing system complexity while achieving doubled pixel capacity

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If a single DMD is used to project images, then the device is simple and cost-effective, but the image resolution is limited

Engineering Contradiction:
Improveimage resolutionVSAvoidmanufacturing simplicity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent segments the image formation process into separate polarization-based pathways, with each DMD handling a specific polarization component. This segmentation enables higher resolution through multiple independently controllable DMDs while maintaining manufacturing simplicity through the use of standard, off-the-shelf DMD components and well-established optical elements like polarization beam splitting cubes

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes the polarization parameter of light to create distinct image sets. By manipulating the polarization state (separating s-polarization and p-polarization components) and then recombining them, the system achieves enhanced image resolution without requiring fundamental changes to the DMD structure or manufacturing process, thus maintaining ease of manufacture while improving precision

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances the resolution of images on substrates by creating approximately twice the number of pixels as conventional methods while reducing costs associated with additional image projection devices.

Implementation Method 1

splitting the single beam of light into an s-polarization beam and a p-polarization beam

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 2

reflecting the s-polarization beam and the p-polarization beam through the multiple DMD assembly such that the multiple DMD assembly produces a plurality of superimposed images on the substrate

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS10705431B2Quarter wave light splitting
Publication Date: 2020.07.07 APPLIED MATERIALS INC
  • US10705431B2 patent drawing
  • US10705431B2 patent drawing
  • US10705431B2 patent drawing

AI summary

Embodiments of the present disclosure provide methods for producing images on substrates. The method includes providing a p-polarization beam to a first mirror cube having a first digital micromirror device (DMD), providing an s-polarization beam to a second mirror cube having a second DMD, and reflecting the p-polarization beam off the first DMD and reflecting the s-polarization beam off the second DMD such that the p-polarization beam and the s-polarization beam are reflected towards a light altering device configured to produce a plurality of superimposed images on the substrate.