DNA Self-Assembly on Patterned Substrates for Low-Defect Nanostructures

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Solution Overview

Problem

Conventional lithographic processes face challenges in fabricating nanostructures with dimensions less than 40 nm, as they are expensive, slow, and limited in forming structures below 20 nm, while self-assembled block copolymers struggle to produce nanostructures with low defect levels and limited to periodic patterns.

Innovation Solution

The use of self-assembled nucleic acids, specifically DNA structures, on a patterned substrate with tailored regions for selective adsorption, enabling directed self-assembly with or without orientational and sequential control to form nanostructures with dimensions less than 40 nm and reduced defects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional top-down fabrication methods (e.g., electron-beam lithography) are used to create nanoscale features, then manufacturing precision can be improved, but device complexity and cost increase significantly

Engineering Contradiction:
Improvenanoscale feature precisionVSAvoidfabrication process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent employs DNA molecules to perform self-assembly into predetermined nanoscale structures without requiring complex external fabrication equipment. The DNA strands autonomously find and bind to their complementary partners, forming precise nanoscale features through natural base-pairing rules, thereby eliminating the need for electron-beam lithography and other complex top-down fabrication methods.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The invention replaces mechanical fabrication systems (electron beams, lithography equipment) with a chemical/biological system based on DNA hybridization. Instead of using physical forces to pattern materials, the patent uses molecular recognition and thermodynamic self-organization to achieve nanoscale precision, substituting a complex mechanical fabrication paradigm with a simpler chemical self-assembly process.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If conventional lithography methods are used for nanofabrication, then manufacturing precision is maintained, but productivity decreases due to sequential processing steps

Engineering Contradiction:
Improvefeature size controlVSAvoidfabrication throughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent pre-programmes the desired nanoscale structures into the DNA sequence design before assembly begins. By encoding the final structure's geometric and functional information directly into the DNA sequences, the system performs the 'design' action in advance, allowing parallel self-assembly of multiple structures simultaneously without requiring sequential processing steps, thereby dramatically improving productivity while maintaining precision.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention merges multiple fabrication operations into a single self-assembly step. Instead of performing separate lithography, etching, and assembly operations sequentially, the DNA-programmed system combines pattern formation, structure assembly, and functional integration into one concurrent process, enabling parallel production of multiple nanoscale features and significantly increasing fabrication throughput.

Inventive Principle:
Principle #5Merging (Combining)

3Device complexity

If DNA-based self-assembly is used to form nanoscale features, then device complexity is reduced, but manufacturing precision may be compromised without proper control methods

Engineering Contradiction:
Improvefabrication process simplicityVSAvoidnanoscale feature accuracy
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The patent employs a multi-parameter optimization approach where DNA sequence composition, length, and hybridization conditions are carefully tuned to achieve precise nanoscale structures. By adjusting parameters such as DNA strand concentration, temperature profiles, and sequence design, the system maintains manufacturing precision while utilizing the simplicity of self-assembly, demonstrating that parameter control can bridge the gap between process simplicity and feature accuracy.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method allows for the fabrication of nanostructures with reduced defects and arbitrary shapes, suitable for semiconductor devices, by utilizing the energy minimization of DNA structures to achieve precise adsorption on patterned substrates, facilitating the creation of sublithographic features.

Implementation Method 1

The method comprises providing a first set of single-stranded nucleic acids and a second set of single-stranded nucleic acids, where the single-stranded nucleic acids of the first set are complementary to the single-stranded nucleic acids of the second set

Methodology Applied
Scientific EffectHybridization: Chemical Bonding

Implementation Method 2

Methods of forming nanostructures using self-assembled nucleic acids

Methodology Applied
Scientific EffectSelf-assembly: Self-Assembly

Data Source

PatentEP3277806B1Methods of forming nanostructures using self-assembled nucleic acids, and nanostructures thereof
Publication Date: 2026.01.21 MICRON TECHNOLOGY INC
  • EP3277806B1 patent drawingFigure 1
  • EP3277806B1 patent drawingFigure 2
  • EP3277806B1 patent drawingFigure 3

AI summary

A method of forming a nanostructure comprises forming a directed self assembly of nucleic acid structures on a patterned substrate. The patterned substrate comprises multiple regions. Each of the regions on the patterned substrate is specifically tailored for adsorption of specific nucleic acid structure in the directed self-assembly.