Do-Not-Inspect Region Verification and Modification
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Solution Overview
Problem
In mask defect inspection systems, false defects are induced due to calibration trade-offs, leading to operational interruptions, and existing methods cannot verify or modify Do-Not-Inspect-Regions (DNIRs) without operating the system, causing inefficiencies.
Innovation Solution
A verification method that includes storing DNIR information, calculating minimum size and distance between regions, and modifying them to ensure compliance with DNIR placement rules, allowing for verification and modification without system operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If DNIRs are defined to cover regions with poor pattern fidelity to avoid false defects, then false defect induction is reduced, but the DNIR area increases and may violate placement rules
Solution Approach 1:
The patent divides the DNIR definition into multiple iterative segments. Instead of defining one large DNIR, the system segments the inspection regions and iteratively defines smaller DNIRs that collectively cover problematic areas while maintaining compliance with placement rules. This is achieved by dividing the photomask into multiple inspection regions and processing them separately in iterations.
Solution Approach 2:
The patent applies preliminary action by performing rule verification and modification before final DNIR placement. The system预先 calculates potential DNIR placements, verifies them against placement rules, and modifies them if violations are detected before committing to the final DNIR configuration. This prevents rule violations and reduces the total DNIR area needed.
2Manufacturing precision
If multiple small DNIRs are defined to minimize inspection area exclusion, then DNIR placement rule compliance is improved, but verification complexity increases
Solution Approach 1:
The patent implements self-service through automated rule verification and modification systems. Instead of manual verification of DNIR placements against complex placement rules, the system automatically calculates distances between DNIRs, checks minimum distance requirements, and modifies DNIR placements to comply with rules. This automation handles the verification complexity internally.
Solution Approach 2:
The system employs feedback mechanisms where DNIR placements are continuously verified against placement rules, and modifications are made based on verification results. If a DNIR placement violates minimum distance rules, the system receives feedback and automatically adjusts the placement. This iterative feedback loop ensures rule compliance while managing verification complexity through systematic checking.
3Ease of operation
If DNIR placement is performed manually without automated verification, then system operation simplicity is maintained, but rule violation detection capability is lost
Solution Approach 1:
The patent introduces an intermediary automated verification and modification system that acts as a mediator between manual DNIR definition and final DNIR placement. This intermediary automatically checks placements against rules, provides feedback on violations, and suggests or implements modifications. This maintains ease of operation for users while ensuring precise rule violation detection through automated analysis.
Data Source
AI summary
A verification method and apparatus for do-not-inspect region rules include storing information specifying do-not-inspect regions, and storing a pixel unit size which defines a length of a single pixel unit. A minimum size verification process includes calculating sizes of do-not-inspect regions, and verifying whether a minimum size rule is obeyed, the minimum size rule requiring that a size of a do-not-inspect region is equal to or greater than a single pixel unit size while referring to the stored pixel unit size. A distance verification process includes calculating distances between pairs of do-not-inspect regions from among the do-not-inspect regions, and verifying whether a distance rule is obeyed, the distance rule requiring that the distance is in a range of greater than zero and less than a predetermined distance.