Dopant Group-Substituted Cyclo(silane Precursors for Uniform Semiconductor Films
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Solution Overview
Problem
Current methods for forming semiconducting thin films from liquid silicon precursors face challenges in doping and reproducibility, resulting in disappointing film properties and unreliable commercial-scale production.
Innovation Solution
Development of hetero-substituted (cyclo)silane compounds of the formula (AnHz)m(DR13−m)q, where n is from 3 to 12, m is from 1 to 3, and D is Sb, As, or B, which are synthesized by reacting (cyclo)silanes with dopant group precursors and purified, then formulated into ink compositions for printing or spin-coating, followed by curing and annealing to produce doped semiconductor films.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If dopant atoms are covalently bound to silicon atoms in liquid (cyclo)silanes, then doping capability is improved, but film properties and reproducibility deteriorate
Solution Approach 1:
The invention separates the dopant atom D from the cyclic silane ring structure, placing the dopant in an exocyclic position. This segmentation allows the dopant to be introduced while maintaining the integrity of the cyclic silane core, thereby improving film properties and reproducibility while retaining doping capability.
Solution Approach 2:
The dopant atom is positioned at a specific local site (exocyclic position) rather than being integrated into the ring structure. This local substitution approach allows precise control over dopant placement and concentration, improving both film quality and reproducibility while maintaining doping functionality.
2Adaptability or versatility
If dopant atoms are introduced into liquid silicon precursors, then semiconducting function is improved, but manufacturing reliability deteriorates
Solution Approach 1:
The dopant atom is pre-introduced into the liquid silicon precursor molecule in a controlled exocyclic position, allowing the precursor to be stored and handled in liquid form with known dopant content. This preliminary doping action enables reliable manufacturing by eliminating the need for post-deposition doping steps and ensuring consistent dopant distribution.
Solution Approach 2:
The invention changes the structural parameter of dopant positioning from endocyclic (within the ring) to exocyclic (outside the ring). This parameter change improves manufacturing reliability by simplifying the synthesis and processing steps while maintaining the semiconducting function through preserved dopant-silicon bonding.
3Stability of the object's composition
If covalent bonds between dopant and silicon are preserved through synthesis steps, then dopant stability is improved, but processing complexity increases
Solution Approach 1:
The invention extracts the dopant atom from the cyclic ring structure and places it in an exocyclic position. This extraction simplifies the molecular structure, making the compound more stable and easier to process while maintaining the covalent bond between dopant and silicon. The simplified structure reduces processing complexity while preserving dopant stability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The approach enables the production of commercial-quality doped semiconductor films with uniform dopant distribution, improving film properties and reproducibility, suitable for high-volume commercial use.
Implementation Method 1
covalently binding dopant atoms such as phosphorous and boron to silicon atoms
Implementation Method 2
spin-coating
Implementation Method 3
printing
Implementation Method 4
annealing
Implementation Method 5
curing
Data Source
AI summary
Dopant-group substituted (cyclo)silane compounds, liquid-phase compositions containing such compounds, and methods for making the same. Such compounds (and/or ink compositions containing the same) are useful for printing or spin coating a doped silane film onto a substrate that can easily be converted into a doped amorphous or polycrystalline silicon film suitable for electronic devices. Thus, the present invention advantageously provides commercial qualities and quantities of doped semiconductor films from a doped “liquid silicon” composition.