Doped Light-Absorbing Slab for Optical Waveguide Termination

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Solution Overview

Problem

Imperfect termination of optical waveguides in silicon photonic circuits leads to back-reflections, causing noise in optical signals due to coherent interactions of individual noise contributions, which results in unpredictable and significant impairments, especially in large component systems.

Innovation Solution

The optical waveguide termination employs a doped, light-absorbing slab supporting a curved or angled rib waveguide with a tapered tip and dopant gradient, designed to minimize back-reflections by absorbing light effectively, using geometrical transitions and internal reflection to enhance absorption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a simple waveguide termination is used, then the device complexity is reduced, but back-reflections cause noise and signal impairments

Engineering Contradiction:
Improvesignal qualityVSAvoidtermination structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies parameter changes by doping the silicon slab with phosphorus to alter its optical absorption properties. The dopant concentration is varied to optimize light absorption while minimizing back-reflections, transforming the slab from a simple structural element to an active optical component that absorbs light energy and converts it to heat, thereby reducing reflections without requiring complex multi-layer structures

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The doped silicon slab acts as an intermediary between the waveguide and the substrate. It absorbs the optical energy that would otherwise reflect back into the waveguide, serving as a mediator that converts harmful back-reflections into thermal energy, thereby protecting the optical signal from degradation without requiring complex termination structures

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a doped, light-absorbing slab is used to reduce back-reflections, then signal quality improves, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvesignal qualityVSAvoidfabrication process
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent merges the waveguide structure and the absorption layer into a single integrated component. The doped silicon slab is formed as part of the same semiconductor substrate as the waveguide, allowing both structures to be fabricated simultaneously using standard CMOS-compatible processes, thereby reducing overall manufacturing complexity despite the added doping step

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The doping process uses standard semiconductor fabrication techniques with controllable parameters. By adjusting dopant concentration and distribution, the optical absorption properties are tuned to optimize performance while using established manufacturing processes, making the complex function achievable through parameter optimization rather than process complexity

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the slab is highly doped to increase light absorption, then back-reflection is reduced, but optical loss in the waveguide increases

Engineering Contradiction:
Improveback-reflection suppressionVSAvoidoptical loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies local quality by doping only the slab region beneath the waveguide while keeping the waveguide itself undoped or lightly doped. This creates a spatially differentiated structure where the slab has high optical absorption locally to suppress reflections, while the waveguide maintains low loss for signal transmission, allowing each region to have optimized properties for its specific function

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution significantly reduces back-reflection, ensuring low optical return loss and minimizing signal noise, making it suitable for dense photonic circuits where space is limited and noise reduction is critical.

Implementation Method 1

a doped, light-absorbing slab supporting a curved rib waveguide... absorbing light from the rib waveguide

Methodology Applied
Scientific EffectOptical absorption: Absorption (EM radiation)

Implementation Method 2

The dopant may be phosphorus and the dopant concentration in the slab may be between 1×10^19 atoms/cm³ and 1×10^21 atoms/cm³... absorbing light from the rib waveguide

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentEP3446164B1Optical waveguide termination having a doped, light-absorbing slab
Publication Date: 2023.10.25 HUAWEI TECH CO LTD
  • EP3446164B1 patent drawingFigure 1
  • EP3446164B1 patent drawingFigure 2A~2B
  • EP3446164B1 patent drawingFigure 3

AI summary

An optical waveguide termination (10) includes a light-receiving inlet (20) for receiving light to be terminated, a rib waveguide (25) extending from the inlet (20), a doped, light-absorbing slab (28) supporting the rib waveguide(25) for absorbing light from the rib waveguide (25), and a tip (30) at an end of the rib waveguide (25). The optical waveguide termination (10) exhibits low back-reflection.