Dot Matrix Transfer Head for Multi-Pitch Semiconductor Die Alignment

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Solution Overview

Problem

Conventional semiconductor device transfer mechanisms lack adaptability and precision, leading to inefficiencies and increased time in reconfiguring for different applications, resulting in larger product dimensions and higher manufacturing costs due to the need for packaging.

Innovation Solution

A direct transfer mechanism that uses a dot matrix transfer head with actuable impact wires to precisely align and transfer unpackaged semiconductor device die from a wafer tape to a product substrate without packaging, allowing for multi-pitch or matched-pitch configurations to accommodate varying die and circuit trace spacings, thereby reducing product thickness and manufacturing time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional packaging processes are used to protect semiconductor die, then device reliability is improved, but product thickness and volume increase significantly

Engineering Contradiction:
Improvedevice protectionVSAvoidproduct volume
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent extracts the protective function from the traditional bulky packaging structure and implements it through a thin-film encapsulation layer deposited directly on the die surface. This allows the protective function to be maintained while eliminating the need for thick packaging materials and complex packaging structures, thereby significantly reducing product volume while maintaining device reliability

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs thin-film encapsulation layers (such as alternating organic and inorganic thin films) to provide protection against environmental factors. These thin films replace traditional thick packaging materials, maintaining protective functionality while minimizing the increase in product thickness and volume

Inventive Principle:
Principle #30Flexible shells and thin films

2Adaptability or versatility

If transfer mechanisms are reconfigured for different products, then adaptability is improved, but reconfiguration time and complexity increase

Engineering Contradiction:
Improveproduct adaptabilityVSAvoidreconfiguration time
Core Design Contradiction:
Adaptability or versatilityVSLoss of time

Solution Approach 1:

The patent designs a transfer mechanism with a modular pick-and-place head that can accommodate different die sizes, shapes, and pitches through interchangeable grippers and adjustable positioning systems. This universal design allows the same base mechanism to handle multiple product types without requiring complete reconfiguration, thereby reducing reconfiguration time while maintaining adaptability

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent incorporates dynamically adjustable components in the transfer mechanism, including variable pitch conveyors, adjustable gripper forces, and programmable positioning systems. These dynamic elements allow the mechanism to adapt to different product specifications through software control rather than physical reconfiguration, minimizing downtime and maintaining versatility

Inventive Principle:
Principle #15Dynamics

3Manufacturing precision

If precise alignment is achieved for die transfer, then manufacturing precision is improved, but device thickness increases

Engineering Contradiction:
Improvedie alignment precisionVSAvoiddevice thickness
Core Design Contradiction:
Manufacturing precisionVSVolume of moving object

Solution Approach 1:

The patent replaces traditional mechanical alignment systems with laser-based optical alignment and vision guidance systems. These non-contact measurement and positioning methods achieve high precision die alignment without requiring thick mechanical alignment structures or complex mechanical adjustment mechanisms, thereby maintaining manufacturing precision while minimizing device thickness

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentEP3935668B1Multi-axis movement for transfer of semiconductor devices
Publication Date: 2024.07.10 COWLES SEMI LLC
  • EP3935668B1 patent drawingFigure 1
  • EP3935668B1 patent drawingFigure 2
  • EP3935668B1 patent drawingFigure 3

AI summary

A method for executing a direct transfer of semiconductor device die from a first substrate to transfer locations on a second substrate. The method includes determining a position of impact wires disposed on a transfer head, semiconductor device die, and transfer locations; determining whether there are at least two positions that an impact wire, a semiconductor device die, and a transfer locations are aligned within a threshold tolerance; and transferring, by the impact wires, the semiconductor device die such that the semiconductor device die detaches from the first substrate and attaches to transfer locations on the second substrate. The transferring being completed based at least in part on determining that the impact wire, the semiconductor device die, and the circuit trace are aligned within the threshold tolerance.