Double-Bellows Flexible Pipe with Oxygen Leak Detection
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Solution Overview
Problem
Current methods for detecting leakage in flexible bellows used in semiconductor manufacturing equipment are inadequate, as they either lose flexibility, require expensive sensors, or cannot accurately detect corrosion-induced leaks between inner and outer bellows, especially in high-pressure and high-temperature environments.
Innovation Solution
A flexible pipe with a corrugated tubular shape featuring an outer and inner bellows connected by flanges, equipped with an oxygen sensor that detects variations in oxygen levels in the atmospheric space between them, allowing for accurate leakage detection without the need for pressurized gas injection or external power sources.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If argon gas is injected at high pressure (30-100 bar) to detect leakage in bellows, then leakage detection capability is improved, but flexibility of the bellows is lost and mounting becomes difficult
Solution Approach 1:
The patent changes the pressure parameter from high pressure (30-100 bar) to atmospheric pressure (1 bar) for the detection gas, allowing the bellows to maintain flexibility while enabling leakage detection through oxygen concentration measurement rather than pressure differential
Solution Approach 2:
The patent replaces the mechanical pressure-based leakage detection system with an oxygen concentration sensing system, eliminating the need for high-pressure gas injection and associated mechanical complexity
2Measurement precision
If argon gas is injected into double bellows at high pressure, then leakage detection is enabled, but the bellows cannot maintain normal shape and become rigid
Solution Approach 1:
The patent changes the operating pressure from high pressure (30-100 bar) to atmospheric pressure (1 bar), allowing the bellows to maintain its normal corrugated shape while enabling leakage detection through oxygen concentration measurement in the space between inner and outer bellows
3Measurement precision
If expensive sensors are used for accurate leakage detection, then measurement precision is improved, but manufacturing cost increases
Solution Approach 1:
The patent employs inexpensive oxygen concentration sensors instead of expensive specialized leakage detection sensors, achieving adequate measurement precision for leakage detection while significantly reducing manufacturing costs
Solution Approach 2:
The patent uses oxygen concentration sensing, which is a common and inexpensive measurement technique applicable to multiple scenarios, rather than specialized expensive sensors designed solely for high-pressure bellows leakage detection
4Ease of manufacture
If high pressure (30-100 bar) is applied during bellows manufacturing, then bellows formation is achieved, but pitting corrosion occurs simultaneously inside and outside making detection impossible
Solution Approach 1:
The patent introduces atmospheric pressure and oxygen-filled space between the inner and outer bellows during manufacturing, creating a detection environment before corrosion occurs, allowing future detection of pitting corrosion through oxygen concentration changes without requiring high-pressure conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy installation and accurate leakage detection in high-temperature environments, extending the lifespan of the flexible pipe to over two years with a built-in battery-powered oxygen sensor, improving workability and reducing manufacturing costs.
Implementation Method 1
equipped with an oxygen sensor that detects variations in oxygen levels in the atmospheric space between them
Data Source
AI summary
Disclosed are a flexible pipe and a manufacturing method thereof. The flexible pipe includes an outer bellows formed in a corrugated tubular shape with mountains and valleys, an inner bellows formed in a corrugated tubular shape with mountains and valleys and provided inside the outer bellows, a pair of flanges connected to both ends of the outer bellows and the inner bellows, respectively, and a detection unit for checking whether leakage occurs due to damage or breakage of the outer and inner bellows by detecting an amount of oxygen present in an air having an atmospheric pressure and filled in an atmospheric space between the outer and inner bellows. Leakage due to damage or breakage of the outer and inner bellows can be detected based on variation in the amount of oxygen present in the space between the outer bellows and the inner bellows.