Double Door Seal Vacuum Overpressure Process Chamber
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current process chamber systems are unable to efficiently handle both vacuum and pressure processes above atmospheric pressure in the same chamber, leading to inefficiencies and exposure of substrates to oxygen during process transitions.
Innovation Solution
A process chamber system with a double door seal utilizing a hydraulic lift mechanism and O-ring seals, which creates a high vacuum gap that overcomes opposing forces, allowing for seamless operation from vacuum to overpressure conditions without external latching, using a combination of vacuum pulsing and inert gas flushing to maintain low oxygen levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a single door seal is used for vacuum processes, then the chamber can achieve high vacuum, but it cannot maintain sealing under overpressure conditions greater than atmospheric pressure
Solution Approach 1:
The door seal is segmented into a double-door configuration with an inner door and an outer door, each with separate seals. This segmentation allows the inner door to handle vacuum sealing while the outer door handles overpressure sealing, enabling the system to adapt to different pressure conditions without compromising sealing reliability.
Solution Approach 2:
A vacuum chamber is introduced as an intermediary space between the inner and outer door seals. This intermediate vacuum chamber allows the inner door seal to operate in a vacuum environment while the outer door seal operates in the process pressure environment, mediating between the two opposing pressure conditions.
2Productivity
If the chamber is opened for process transitions, then pressure changes can occur, but substrates are exposed to oxygen during transitions
Solution Approach 1:
The system performs preliminary vacuum sealing with the inner door before pressure changes occur. This preliminary action ensures substrates are already protected from oxygen exposure before any pressure transition begins, allowing safe process transitions without harmful oxygen exposure.
Solution Approach 2:
The inner door and its vacuum seal act as an intermediary barrier that can be opened to allow pressure transitions while keeping substrates protected in the vacuum environment. This mediator enables process changes without direct oxygen exposure to substrates.
3Reliability
If external latching mechanisms are used to seal the chamber, then overpressure sealing can be achieved, but the system complexity increases
Solution Approach 1:
The door seal system uses self-service mechanisms where vacuum pressure itself creates the sealing force on the inner door, and process pressure creates the sealing force on the outer door. This eliminates the need for complex external latching mechanisms, as the pressure differential automatically provides the necessary sealing force.
Solution Approach 2:
Complex mechanical latching systems are replaced with a pneumatic/hydraulic sealing system where pressure differentials across the door seals provide the sealing force. This substitution of mechanical latching with pressure-based sealing reduces system complexity while maintaining overpressure sealing reliability.
4Object-affected harmful factors
If vacuum pulsing and inert gas flushing are used to maintain low oxygen levels, then oxygen concentration decreases, but the process time increases
Solution Approach 1:
The system performs preliminary vacuum sealing and atmosphere preparation before substrates are exposed to process conditions. This preliminary action establishes a low-oxygen environment in advance, reducing the need for extended vacuum pulsing and inert gas flushing during the actual process, thereby minimizing time loss.
Solution Approach 2:
The inner door vacuum chamber serves as an intermediary environment that can be independently controlled and prepared with low oxygen levels before substrates are introduced or processed. This mediator allows atmosphere preparation to occur separately and efficiently, reducing the time penalty for oxygen control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient processing of substrates at varying pressures without exposing them to oxygen, achieving significantly lower oxygen concentrations and improved drying and imidization results by maintaining a controlled atmosphere and reducing residual solvent and bubbling issues.
Implementation Method 1
The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components
Implementation Method 2
The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components
Data Source
AI summary
A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.