Double-Ended Stem Micro-Wineglass Gyroscope
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Solution Overview
Problem
Micro-wineglass gyroscopes face structural weakness at the stem structure, which is prone to stress concentration and deformation under environmental vibrations and shocks, requiring hermetic sealing for optimal performance, but existing packaging techniques are not suitable for three-dimensional structures.
Innovation Solution
A method for fabricating double-ended stem structures with a co-fabricated hermetic package using micro-glassblowing to create a shield around the wineglass structure, providing double-ended clamped-clamped configuration for increased rigidity and shock resistance, and incorporating co-fabricated heaters and electrodes for temperature stabilization and electrostatic transduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single-point stem structure is used to attach the resonator to the package, then anchor loss mitigation and immunity to package stresses are achieved, but the structure becomes the weakest point prone to stress concentration and deformation under environmental vibrations and shock
Solution Approach 1:
The patent divides the attachment function into two separate attachment points instead of one, creating a dual-attachment stem structure. This segmentation distributes the mechanical stress and vibration loads across two points, preventing stress concentration at a single location while maintaining the decoupling function for anchor loss mitigation.
Solution Approach 2:
The patent extends the stem structure into a three-dimensional configuration with two attachment points at different locations, transitioning from a simple single-point attachment to a spatially distributed dual-attachment architecture. This dimensional change allows the structure to better withstand environmental vibrations and shock loads.
2Reliability
If hermetic sealing is implemented to shield the gyroscope from environmental factors, then performance is optimized, but existing wafer-level sealing techniques are not suitable for three-dimensional micro-wineglass structures
Solution Approach 1:
The patent integrates the hermetic seal structure within the same wafer substrate as the three-dimensional micro-wineglass gyroscope structure. The seal forms a nested enclosure that contains the 3D resonator, allowing wafer-level sealing techniques to be applied to complex three-dimensional structures by nesting the seal around the resonator rather than requiring separate packaging steps.
Solution Approach 2:
The patent designs a unified wafer structure that simultaneously provides both the three-dimensional resonator support and the hermetic sealing function. This multi-functional design allows a single wafer-level fabrication process to achieve both structural support and environmental protection, making the sealing technique universally applicable to 3D micro-wineglass gyroscopes.
3Measurement precision
If the gyroscope operates in vacuum to mitigate viscous air damping, then highest performance is achieved, but hermetic sealing is required which adds package complexity
Solution Approach 1:
The patent merges the hermetic seal structure with the wafer substrate and support structure into a single integrated component. By combining the sealing function with the structural support function in one unified wafer-level structure, the patent reduces overall package complexity while maintaining vacuum operation for high-precision vibration sensing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly enhances structural rigidity and robustness, enabling the gyroscope to withstand accelerations in excess of 50,000 g, improves vibration rejection, and allows for low-cost wafer-level fabrication of vibration-hardened micro-wineglass gyroscopes.
Implementation Method 1
micro-glassblowing to build a shield around the micro-glassblown wineglass structure
Implementation Method 2
electrodes for in-situ electrostatic transduction
Implementation Method 3
co-fabricated heaters for temperature stabilization
Data Source
AI summary
A method for fabricating an environmentally robust micro-wineglass gyroscope includes the steps of stacking and bonding of at least an inner glass layer and an outer glass layer to a substrate wafer; plastically deforming the inner glass layer into a mushroom-shaped structure and deforming the outer glass layer into a shield capable of extending over the inner glass layer, while leaving the inner and outer glass layers connectable at a central post location; removing the substrate layer and a portion of the inner glass layer so that a perimeter of the inner glass layer is free; and bonding the deformed inner and outer glass layers to a handle wafer. The resulting structure is an environmentally robust micro-wineglass gyroscope which has a double ended supported central post location for the mushroom-shaped structure of the inner glass layer.