Double-Layer 3D Fan-Out Packaging Structure for High Integration

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Solution Overview

Problem

Conventional single-layer fan-out wafer-level packaging technologies result in low integration levels and large package volumes, limiting the performance of integrated circuits due to the need for re-packaging multiple chips, which increases the complexity and size of the circuit interconnections.

Innovation Solution

A double-layer packaged 3D fan-out packaging structure is developed, which includes a first semiconductor chip, a first packaging material layer, a metal connecting pillar, a first rewiring layer, a second rewiring layer, a second semiconductor chip, a solder ball bump, and a second packaging material layer, allowing for the stacking of two layers of fan-out wafers in the third-dimensional direction, thereby improving integration and reducing package volume.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If single-layer fan-out wafer-level packaging is used, then the packaging process is simple, but the integration level is low and package volume is large

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidintegration level
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The patent transitions from single-layer (2D) packaging to double-layer (3D) packaging by stacking fan-out wafers vertically. Multiple chips are packaged in the third dimension, achieving higher integration without significantly complicating the packaging process. The double-layer structure allows chips to be arranged in stacked configurations, improving space utilization and integration level.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Ease of manufacture

If single-layer fan-out wafer-level packaging is used, then the packaging process is simple, but the package volume is large

Engineering Contradiction:
Improvepackaging process simplicityVSAvoidpackage volume
Core Design Contradiction:
Ease of manufactureVSVolume of stationary object

Solution Approach 1:

By stacking fan-out wafers in the vertical direction (third dimension), the patent reduces the horizontal footprint of the package. The double-layer configuration allows multiple chips to occupy less planar space, thereby reducing overall package volume while maintaining manufacturing simplicity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements a nested structure where one fan-out wafer is placed on top of another, with lower-layer chips nested within the vertical space occupied by upper-layer chips. This nesting approach maximizes space utilization and reduces the external dimensions of the final package.

Inventive Principle:
Principle #7Nested doll (Nesting)

3Quantity of substance

If multiple chips are re-packaged to achieve higher density, then circuit interconnection is possible, but the integration level remains low and package volume increases

Engineering Contradiction:
Improvechip densityVSAvoidre-packaging complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent performs fan-out wafer formation and chip attachment in advance, creating pre-assembled wafer layers that can be directly stacked. This preliminary action eliminates the need for complex re-packaging operations, as chips are already positioned and connected before the final stacking process. The pre-formed wafer structure simplifies subsequent assembly steps.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent divides the packaging process into independent stages: forming individual fan-out wafers with attached chips, then stacking these pre-formed layers. This segmentation allows each wafer to be processed separately and independently, reducing overall process complexity while achieving high chip density through vertical integration.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20220271009A1Double-layer packaged 3D fan-out packaging structure and method making the same
Publication Date: 2022.08.25 SJ SEMICONDUCTOR (JIANGYIN) CORP
  • US20220271009A1 patent drawing
  • US20220271009A1 patent drawing
  • US20220271009A1 patent drawing

AI summary

The present disclosure provides a double-layer packaged 3D fan-out packaging structure and a method making the same. The structure includes: a first semiconductor chip, a first packaging material layer, a metal connecting pillar, a first rewiring layer, a second rewiring layer, a second semiconductor chip, solder ball bumps, and a second packaging material layer. The formed double-layer packaged 3D fan-out packaging structure can package two sets of fan-out wafers in the three-dimensional direction. A single package stacked up after die-cutting has two sets of chips in the third direction. The electrical signals of all chips in a single package can be controlled by arranging a first rewiring layer, a metal connecting post, and the second rewiring layer, so that more chips can be packaged in a single package, thus improving the integration level of the package and reducing the package volume.