Double-Layer Temperature Control Structure for Isothermal MEMS Mounting

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Solution Overview

Problem

Existing temperature measurement solutions for oven-controlled MEMS oscillators are susceptible to ambient temperature fluctuations, leading to low precision in temperature measurement.

Innovation Solution

A double-layer structure design for a temperature control apparatus, where a fastening frame at the outer layer is in contact with the external environment, and a fastening structure at the inner layer is connected through support beams to maintain isothermal conditions, reducing the impact of ambient temperature fluctuations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If a single-layer structure is used for temperature control, then the device complexity is low, but the temperature measurement precision is poor due to ambient temperature interference

Engineering Contradiction:
Improvetemperature measurement precisionVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The temperature control structure is divided into multiple layers: an outer fastening frame that contacts the ambient environment and an inner fastening structure that holds the target component, connected through support beams. This segmentation creates thermal zones that isolate the target component from ambient temperature fluctuations, improving temperature measurement precision without excessive complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The support beams act as intermediary thermal elements connecting the outer fastening frame to the inner fastening structure. These beams mediate the thermal interaction, allowing controlled heat transfer while maintaining isothermal conditions at the target component, thus improving measurement precision through structured thermal management

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If the fastening structure is directly connected to the fastening frame without support beams, then the device complexity is reduced, but the temperature uniformity across the target component deteriorates

Engineering Contradiction:
Improvetemperature uniformityVSAvoidstructure complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

The support beams are strategically positioned and designed with specific thermal properties to create localized isothermal zones at the inner fastening structure. This local quality approach ensures that the target component experiences uniform temperature distribution, while the outer frame can vary in temperature due to ambient fluctuations

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The support beams extend in the vertical dimension, creating a three-dimensional thermal management structure. This dimensional approach allows heat to be distributed uniformly across the inner fastening structure from multiple directions, improving temperature uniformity beyond what a simple planar connection could achieve

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Stability of the object's composition

If the outer fastening frame is isolated from the ambient environment, then the temperature stability of the target component is improved, but the heat dissipation capability deteriorates

Engineering Contradiction:
Improvetemperature stabilityVSAvoidheat dissipation
Core Design Contradiction:
Stability of the object's compositionVSLoss of energy

Solution Approach 1:

The thermal parameters of the support beams are carefully selected to control the rate of heat transfer between the outer frame and inner structure. By adjusting thermal conductivity, cross-sectional area, and length of the support beams, the system achieves optimal balance between temperature stability and heat dissipation capability

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The double-layer structure effectively isolates the target component from external temperature fluctuations, improving temperature measurement precision and maintaining balanced temperatures for the target component.

Implementation Method 1

The first fastening structure is connected to the fastening frame through the two first support beams. The second fastening structure is connected to the fastening frame through the two second support beams.

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250167731A1Temperature Control Apparatus and Related Device
Publication Date: 2025.05.22 HUAWEI TECH CO LTD
  • US20250167731A1 patent drawing
  • US20250167731A1 patent drawing
  • US20250167731A1 patent drawing

AI summary

A temperature control apparatus includes a first fastening structure, a second fastening structure, two first support beams, two second support beams, a fastening frame, and a target component. The first fastening structure and the target component are located on an inner side of the fastening frame. The second fastening structure is located on an outer side of the fastening frame. The first fastening structure is connected to the fastening frame through the two first support beams. The second fastening structure is connected to the fastening frame through the two second support beams. The target component is fastened to the first fastening structure. A temperature difference between a first connection position and a second connection position that are on the fastening frame and that are respectively for connection to the two first support beams is less than a first preset value.