Double O-Ring Flange Leak Detection for Substrate Gas Lines
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Solution Overview
Problem
Existing substrate processing systems face challenges in reducing gas leakage during the processing of semiconductor devices, particularly due to the connection of pipes using flanges and O-rings, which can lead to gas escaping into the atmosphere.
Innovation Solution
A leakage detection apparatus is implemented, featuring two O-rings for a double seal between flanges, a communication hole with a monitor pipe and pressure gauge, and a controller to maintain pressure within a predetermined range, ensuring that any leaked gas is directed to an exhaust apparatus rather than the atmosphere.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If flanges and O-rings are used to connect pipes, then assembly and disassembly become easier, but gas leakage occurs into the atmosphere
Solution Approach 1:
The piping system is divided into multiple sealed segments using flanges with double O-rings. Each segment can be independently assembled and disassembled while maintaining gas-tight seals, allowing maintenance without compromising overall system sealing integrity
Solution Approach 2:
A monitoring system acts as an intermediary between the sealed piping system and the external environment. The monitoring pipe with pressure gauge detects pressure changes that indicate seal failures, providing early warning before actual gas leakage occurs to the atmosphere
2Reliability
If pressure monitoring is implemented, then gas leakage is detected earlier, but device complexity increases
Solution Approach 1:
The system uses its own process gas pressure as the monitoring parameter. The pressure gauge on the monitoring pipe directly reflects the sealing status without requiring external sensors or complex electronic systems, achieving reliable leakage detection through simple pressure measurement
Solution Approach 2:
The monitoring function is extracted as a separate, simple pressure measurement system. The monitoring pipe branches off from the main piping to provide a dedicated pressure measurement point, isolating the monitoring function from the process system while maintaining simplicity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces gas leakage by detecting and managing pressure within the system, preventing harmful gases from escaping into the environment and ensuring a safer, more controlled processing environment.
Implementation Method 1
a pressure gauge connected to the monitor pipe and capable of measuring an inner pressure of the monitor pipe
Implementation Method 2
two O-rings arranged between flanges facing each other, wherein the flanges are provided to connect pipes and the two O-rings are provided so as to seal an inside of each of the pipes from outside in a double seal manner
Implementation Method 3
a valve configured to be capable of being opened and closed to fluidly connect the monitor pipe to an exhaust apparatus
Data Source
AI summary
There is provided a technique that includes: two O-rings arranged between flanges facing each other, wherein the flanges connects pipes and the two O-rings seals an inside of each of the pipes from outside in a double seal manner; a communication hole provided at one of the flanges and communicating with a space surrounded by the two O-rings; a monitor pipe capable of communicating with the communication hole; a pressure gauge connected to the monitor pipe and capable of measuring an inner pressure of the monitor pipe; a valve configured to be capable of being opened and closed to fluidly connect the monitor pipe to an exhaust apparatus; and a controller configured to be capable of controlling an opening and closing operation of the valve so as to maintain a pressure measured by the pressure gauge within a predetermined pressure range lower than inner pressures of the pipes.