Three-Axis Rotation Rate Sensor with Double-Rotor Coriolis Detection
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Solution Overview
Problem
Existing three-axis rotation rate sensors are complex, susceptible to interference, and require additional elements for Z-direction measurement, leading to susceptibility to external vibrations and electrical noise.
Innovation Solution
A three-axis rotation rate sensor design with dual rotors and seismic masses that tilt radially due to Coriolis forces, using phase-opposed drive and detection movements to detect rotations in all directions without additional elements, minimizing interference and requiring fewer springs for robustness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If additional elements and coupling structures are added to enable Z-direction measurement, then three-axis measurement capability is achieved, but device complexity increases and susceptibility to external vibrations and electrical noise increases
Solution Approach 1:
The rotor structure is designed to perform multiple functions: it serves as both the oscillating mass for X-Y plane rotation detection and as the seismic mass for Z-axis rotation detection. The same rotor body that oscillates in the XY plane also contains the seismic masses that detect radial movements, eliminating the need for separate detection elements for each axis.
Solution Approach 2:
The patent combines the detection functions for all three axes into a single integrated rotor structure. The seismic masses are incorporated within the rotor itself, and the coupling structure serves dual purposes by both connecting the rotors and enabling Z-axis detection through radial movement coupling, thereby reducing the total number of separate components.
2Adaptability or versatility
If additional elements and coupling structures are added to enable Z-direction measurement, then three-axis measurement capability is achieved, but susceptibility to external vibrations and electrical noise increases
Solution Approach 1:
The rotor structure is designed to perform multiple functions: it serves as both the oscillating mass for X-Y plane rotation detection and as the seismic mass for Z-axis rotation detection. The same rotor body that oscillates in the XY plane also contains the seismic masses that detect radial movements, eliminating the need for separate detection elements for each axis.
3Adaptability or versatility
If conventional three-axis sensors use additional elements for Z-direction detection, then three-axis measurement is enabled, but the sensor requires many soft spring elements which reduces reliability
Solution Approach 1:
The rotor structure is designed to perform multiple functions: it serves as both the oscillating mass for X-Y plane rotation detection and as the seismic mass for Z-axis rotation detection. The same rotor body that oscillates in the XY plane also contains the seismic masses that detect radial movements, eliminating the need for separate detection elements for each axis.
4Reliability
If a compact design with fewer elements is used, then robustness and resistance to interference improve, but three-axis measurement capability is lost
Solution Approach 1:
The rotor structure is designed to perform multiple functions: it serves as both the oscillating mass for X-Y plane rotation detection and as the seismic mass for Z-axis rotation detection. The same rotor body that oscillates in the XY plane also contains the seismic masses that detect radial movements, eliminating the need for separate detection elements for each axis.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The sensor achieves compact, vibration-resistant, and sensitive three-axis measurement with reduced interference, utilizing symmetrical design and phase-opposed movements to enhance detection quality and frequency stability.
Implementation Method 1
If an external rotation rate in the X or Y direction is applied to the MEMS component, the rotor is deflected by the Coriolis force in the Z direction
Data Source
AI summary
A three-axis rotation rate sensor. The sensor includes a substrate and a double rotor including a first rotor and a second rotor elastically connected to each other via a first coupling element such that the two rotors are excitable to antiphase rotary oscillations, the first rotor including a first and a second seismic mass, which are deflectably mounted vis-à-vis the first rotor and the second rotor includes a third and a fourth seismic mass, which are deflectably mounted vis-à-vis the second rotor, the first mass being connected to the third mass via a first rocker element such that the third mass is deflected in an opposite lateral direction upon a lateral deflection of the first mass, the second mass being connected to the fourth mass via a second rocker element such that the fourth mass is deflected in an opposite lateral direction upon lateral deflection of the second mass.