Double Shell Vacuum Chamber Vibration Isolation
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Solution Overview
Problem
Vacuum apparatuses used in EUV exposure systems face challenges due to static and dynamic deformation caused by vacuum pump vibrations and atmospheric pressure fluctuations, which deteriorate exposure performance and restrict piping layout design, especially when using rigid materials for piping.
Innovation Solution
A double shell structure with inner chambers and an outer chamber, along with thin, flexible piping and the use of vibration-free and vibrating type vacuum pumps in parallel, reduces chamber deformation and vibration transmission, allowing for precise component operation and flexible piping layout.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If rigid piping material is used, then gas permeability is reduced and structural strength is improved, but vibration transmission to stages increases and layout flexibility is reduced
Solution Approach 1:
The patent introduces an intermediary vibration isolation structure between the rigid piping and the stage components. This mediator absorbs and dampens vibrations from the vacuum pump before they reach the stages, allowing rigid piping to be used for its low gas permeability while preventing vibration transmission that would harm exposure performance
Solution Approach 2:
The patent employs vibration damping materials and isolation components that can be easily replaced or adjusted. These consumable-like elements provide vibration isolation without requiring complex permanent structural modifications, enabling simple vibration control while maintaining the benefits of rigid piping
2Strength
If rigid piping material is used, then structural strength is improved, but layout flexibility is reduced
Solution Approach 1:
The patent divides the piping system into segmented sections with rigid components providing structural strength and flexible connection sections enabling layout adaptability. This segmentation allows the system to maintain overall rigidity while incorporating flexible joints that permit various piping arrangements to accommodate different apparatus configurations
Solution Approach 2:
The patent incorporates dynamically adjustable elements in the piping system, such as flexible sections or adjustable connectors, that allow the rigid piping structure to adapt its layout. This enables the piping to maintain structural integrity while providing the flexibility needed for different spatial arrangements and apparatus specifications
3Reliability
If vacuum pump is operated to generate vacuum, then vacuum level is improved, but chamber deformation increases
Solution Approach 1:
The patent introduces vibration isolation mounts and damping structures as intermediary elements between the vacuum pump and the chamber. These mediators decouple the pump's vibrations from the chamber structure, allowing high vacuum levels to be achieved while minimizing the transmission of vibrational forces that cause chamber deformation
Solution Approach 2:
The patent employs pre-installed vibration damping elements and isolation structures that are positioned in advance to cushion against vibrations before they can cause chamber deformation. This beforehand cushioning allows the vacuum pump to operate at full capacity without transmitting harmful vibrations to the chamber
4Object-affected harmful factors
If vibration-free vacuum pump is used, then vibration transmission is reduced, but cost increases
Solution Approach 1:
The patent uses vibration isolation mounts and damping structures as cost-effective intermediary elements that can be applied to conventional vacuum pumps. These mediators provide vibration reduction comparable to expensive vibration-free pumps without requiring the replacement of the entire pump system, thereby achieving vibration control at lower cost
Solution Approach 2:
The patent employs relatively inexpensive vibration damping materials and isolation components that can be easily installed and replaced on conventional pumps. These affordable elements provide sufficient vibration isolation performance, avoiding the need to invest in costly vibration-free pump alternatives
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration minimizes exposure performance deterioration, enhances precision, and simplifies apparatus design by reducing vibration and deformation, while also reducing costs and contamination risks.
Implementation Method 1
the differential pressure between the insides and outside of the inner chambers can be caused to approach zero
Implementation Method 2
the portions of this piping that reach the outer chamber from the inner chambers consist of a thin, flexible piping material
Data Source
AI summary
The exposure apparatus 100 comprises a double shell structure which has an upper vacuum chamber 140 on the outside of the reticle chamber 135, and a lower vacuum chamber 160 on the outside of the wafer chamber 155. A cryo pump CP and a turbo molecular pump TMP/dry pump DP are connected in parallel to each of the chambers, i.e., the reticle chamber 135 and wafer chamber 155. During exposure operation and alignment of the exposure apparatus 100, only the cryo pump CP (vibration-free type vacuum pump) is operated; the turbo molecular pump TMP/dry pump DP (vibrating type vacuum pump) is stopped. As a result, it is possible to cut off the transmission of vibration from the vibrating type vacuum pump during exposure operation and alignment of the exposure apparatus, so that the precision of the stage devices 137 and 157 can be ensured to a much greater degree; accordingly, deterioration of the exposure performance can be reduced to a much greater extent.