Double-Sided Electrostatic Clamp Assembly Without Anodic Bonding
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Solution Overview
Problem
Conventional electrostatic clamps used in lithographic apparatuses face challenges due to the fragility of glass burls and the lengthy manufacturing process involving anodic bonds, which can take over a year and result in high stress and long production times.
Innovation Solution
The development of an electrostatic clamp manufacturing method that uses parallel processing techniques, eliminating anodic bonds and employing optical bonding to join components, allowing for faster production and easier repair of broken burls, with burls having a hardness greater than 6.0 GPa for improved wear resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional electrostatic clamps use glass burls with anodic bonds for manufacturing, then the clamps achieve structural integrity and electrostatic functionality, but the manufacturing process takes over a year and creates high stress in the structure
Solution Approach 1:
The clamp is divided into separate components (clamp body, burls, electrodes) that are manufactured independently and then assembled. This allows parallel processing of different components, reducing overall manufacturing time from over a year to a much shorter duration while maintaining structural integrity through precise assembly interfaces.
Solution Approach 2:
The anodic bonding process is replaced with a mechanical or alternative bonding method. The patent eliminates the lengthy anodic bond curing process by using a different joining technique that does not require extended time for bond development, thereby significantly reducing manufacturing cycle time while still achieving reliable component attachment.
2Ease of operation
If glass burls are used in electrostatic clamps, then the clamps provide necessary surface properties for substrate contact, but the glass burls are fragile and can crack during operation
Solution Approach 1:
The patent transitions from pure glass burls to composite material burls that combine the desirable surface contact properties of glass with the mechanical strength and fracture resistance of other materials. This composite construction maintains the necessary tribological properties for substrate interaction while eliminating the fragility and cracking issues associated with pure glass burls.
3Strength
If anodic bonds are used to join clamp components, then the components are securely attached, but the manufacturing process takes over a year to complete
Solution Approach 1:
The anodic bonding process is replaced with an alternative joining method that achieves secure component attachment without the extended time requirement. This substitution eliminates the multi-month curing and bonding process while maintaining or improving bond strength through mechanical interlocking, adhesives, or other fastening techniques.
Solution Approach 2:
Components are prepared in advance with pre-formed bonding surfaces, pre-assembled subcomponents, or pre-applied bonding agents that eliminate the need for lengthy in-process bonding operations. This preliminary preparation allows components to be quickly joined during final assembly rather than requiring extended bonding cycles.
4Manufacturing precision
If conventional serial manufacturing processes are used for electrostatic clamps, then each component can be carefully manufactured, but the overall production time exceeds one year
Solution Approach 1:
The manufacturing process is segmented into independent parallel streams for different components (clamp bodies, burls, electrodes, assemblies). Each segment can be manufactured simultaneously using optimized processes for that specific component, maintaining high precision through dedicated process parameters while reducing total production time through concurrent execution of multiple manufacturing operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces manufacturing time by approximately seventy-five percent, enhances the durability of the clamps, and facilitates quicker re-working of clamps with broken burls, enabling faster and more reliable return to service with improved tribological properties.
Implementation Method 1
electrostatic clamp that can be used to hold a substrate or a patterning device
Data Source
AI summary
Systems, apparatuses, and methods are provided for manufacturing an electrostatic clamp. An example method can include forming, during a first duration of time comprising a first time, a top clamp comprising a first set of electrodes and a plurality of burls. The method can further include forming, during a second duration of time comprising a second time that overlaps the first time, a core comprising a plurality of fluid channels configured to carry a thermally conditioned fluid. The method can further include forming, during a third duration of time comprising a third time that overlaps the first time and the second time, a bottom clamp comprising a second set of electrodes. In some aspects, the example method can include manufacturing the electrostatic clamp without an anodic bond.