Double-Sided Cylindrical Lens for Deep UV Illumination Uniformity

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Solution Overview

Problem

Conventional lighting optical apparatuses using deep ultraviolet light sources face issues with non-uniform illumination distribution due to misaligned light fluxes, leading to reduced transmittance and potential glass burning from high Fresnel reflection and absorptance.

Innovation Solution

A lighting optical apparatus comprising a deep ultraviolet light source, a first double-sided cylindrical lens with intersecting cylinder axes for splitting light fluxes, and a second double-sided cylindrical lens for aligning and superimposing light fluxes, along with a condenser lens to achieve uniform illumination, reducing components and Fresnel reflection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If conventional cylindrical lenses are used to split light fluxes, then illumination distribution can be achieved, but non-uniform illumination and misaligned light fluxes occur due to lack of field lens alignment

Engineering Contradiction:
Improveillumination distributionVSAvoiduniformity of illumination
Core Design Contradiction:
Illumination intensityVSManufacturing precision

Solution Approach 1:

The patent merges the functions of cylindrical lenses and field lenses into a single integrated optical element. The cylindrical lens array and field lens are combined in one component, allowing light fluxes to be both split and aligned simultaneously, eliminating the misalignment problems that occur when separate cylindrical lenses are used without proper field lens alignment.

Inventive Principle:
Principle #5Merging (Combining)

2Illumination intensity

If multiple separate optical components are used for splitting and aligning light fluxes, then illumination can be achieved, but device complexity increases and adjustments become difficult

Engineering Contradiction:
Improveillumination distributionVSAvoidnumber of optical components
Core Design Contradiction:
Illumination intensityVSDevice complexity

Solution Approach 1:

The patent combines multiple optical functions (cylindrical lens array for splitting and field lens for aligning) into a single integrated optical component. This merger reduces the total number of separate optical elements in the system, simplifying the device structure and reducing adjustment complexity while maintaining effective light flux splitting and alignment.

Inventive Principle:
Principle #5Merging (Combining)

3Manufacturing precision

If deep ultraviolet light source is used for shorter wavelength, then resolution is improved, but Fresnel reflection and absorptance increase causing potential lens burning

Engineering Contradiction:
ImproveresolutionVSAvoidFresnel reflection and absorptance
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The integrated optical design reduces the total number of optical interfaces and surfaces where Fresnel reflection and absorption occur. By combining multiple functions into one component, the patent minimizes the cumulative effect of reflective and absorptive losses that would occur across multiple separate components, thereby reducing the risk of lens burning from deep ultraviolet light.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides high and uniform illuminance on the irradiated surface, reduces the risk of lens burning, and simplifies adjustments due to fewer components, enhancing the productivity and performance of the lighting optical apparatus.

Implementation Method 1

a first double-sided cylindrical lens on which the deep ultraviolet ray emitted from the deep ultraviolet light source is incident, from which the ray is emitted after being split into a plurality of first light fluxes

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 2

a second double-sided cylindrical lens on which the plurality of first light fluxes emitted from the first double-sided cylindrical lens is incident, from which the fluxes are emitted after directions of the plurality of first light fluxes being aligned as a plurality of second light fluxes

Methodology Applied
Scientific EffectRefraction: Refraction

Implementation Method 3

a condenser lens on which the plurality of second light fluxes is incident to superimpose the plurality of second light fluxes

Methodology Applied
Scientific EffectFocusing: Focusing

Data Source

PatentUS7863588B2Lighting optical apparatus and sample inspection apparatus
Publication Date: 2011.01.04 KIOXIA CORP
  • US7863588B2 patent drawing
  • US7863588B2 patent drawing
  • US7863588B2 patent drawing

AI summary

A lighting optical apparatus using a deep ultraviolet light source that are easy to adjust due to a configuration with fewer components, has high illuminant and illuminant uniformity on an irradiated surface are provided. The apparatus has a deep ultraviolet light source from which deep ultraviolet rays are emitted, a first double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, a second double-sided cylindrical lens which has a cylindrical lens array on both sides with a configuration of cylinder axes intersecting at right angles, and a condenser lens.