Double-Sided Imprinting Alignment and Resist Filling
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Solution Overview
Problem
Existing double-sided imprinting technologies face challenges in aligning and positioning substrates and templates accurately, preventing air entrapment, and avoiding damage to substrates during the imprinting process.
Innovation Solution
A method and system for double-sided imprinting that involves aligning reference marks on two webs, dispensing resist onto templates, and curing it with a substrate in between, using rollers and squeegee rollers to ensure precise alignment and filling of resist features, and a clamping system to manage the substrate and templates effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If single-sided imprinting is used, then the process is simple, but double-sided imprinting cannot be achieved
Solution Approach 1:
The imprinting system is divided into two independent but coordinated sides: a first side with a first template and first dispenser, and a second side with a second template and second dispenser. Each side can operate independently to dispense resist and create imprints on opposite sides of the substrate, enabling double-sided imprinting capability while maintaining manageable process complexity through modular design
Solution Approach 2:
The substrate is positioned between two templates in a nested configuration, with the first template on the first side and the second template on the second side. This nested arrangement allows both templates to simultaneously access the substrate from opposite sides, enabling double-sided imprinting within a single integrated process
2Manufacturing precision
If templates are aligned manually, then alignment can be achieved, but positioning precision and alignment accuracy are insufficient
Solution Approach 1:
Reference marks are positioned on both the substrate and templates before the imprinting process begins. These pre-positioned reference marks serve as alignment cues that guide the precise positioning of templates relative to the substrate, ensuring high alignment accuracy without requiring complex real-time alignment systems
Solution Approach 2:
The system uses reference marks visible to detection systems to provide feedback on template and substrate positioning. This feedback mechanism enables precise alignment by allowing the system to detect and correct positional deviations, achieving high manufacturing precision through controlled feedback loops
3Reliability
If resist is dispensed without controlled pressure, then dispensing is simple, but air entrapment and defects occur
Solution Approach 1:
The template is designed with a compliant or dynamically adjustable lower surface that can adapt to the substrate topology. This dynamic interface allows the template to conform to the substrate during resist dispensing, applying controlled pressure to eliminate air entrapment while avoiding damage to the substrate or template features
Solution Approach 2:
A compliant layer or intermediate mechanism between the template and substrate serves as a mediator that controls the pressure distribution during resist dispensing. This intermediary element ensures uniform pressure application to prevent air pockets while protecting both the template and substrate from damage
4Ease of operation
If substrate is handled without protection, then handling is simple, but substrate damage occurs
Solution Approach 1:
Protective measures are implemented before substrate handling occurs, such as protective films or cushioning layers that prevent damage during the imprinting and handling processes. These pre-applied protective elements allow simple handling procedures while preventing substrate damage to imprinted features
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise double-sided imprinting with reduced air entrapment and substrate damage, ensuring accurate alignment and efficient filling of resist features on both sides of the substrate.
Implementation Method 1
The chuck can include a vacuum chuck configured to chuck onto the first web with vacuum
Data Source
AI summary
Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.