Double Tube Fluid Distributor for Uniform Thin Film Cleaning

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Solution Overview

Problem

Conventional thin film cleaning systems apply irregular pressure to the film due to high flow rates of cleaning fluid, leading to potential film folding, drooping, and breakage during the cleaning process.

Innovation Solution

A fluid supplying apparatus with a double tube structure, featuring an inner tube with holes and an outer tube with slots, is used to control and adjust the flow rate and flux of the cleaning fluid, reducing pressure deviations and ensuring uniform pressure application.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If a single tube structure with holes is used to inject cleaning fluid, then the fluid injection capability is provided, but the flow rate becomes too high causing irregular pressure and film damage

Engineering Contradiction:
Improvecleaning fluid flow rateVSAvoidfilm integrity
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The single tube structure is divided into an inner tube and an outer tube, creating a segmented fluid distribution system. The inner tube distributes fluid to multiple injection points, while the outer tube provides additional flow control, thereby reducing the high flow rate that causes film damage while maintaining effective cleaning fluid injection

Inventive Principle:
Principle #1Segmentation

2Speed

If the cleaning fluid flows faster through the holes, then the injection pressure increases, but the flow pattern becomes complicated causing irregular pressure distribution

Engineering Contradiction:
Improvefluid flow speedVSAvoidpressure distribution uniformity
Core Design Contradiction:
SpeedVSStability of the object's composition

Solution Approach 1:

The outer tube acts as an intermediary structure between the inner tube and the cleaning bath. It receives fluid from the inner tube and distributes it through its own openings, mediating the flow to create a more stable and uniform pressure distribution on the film while maintaining effective cleaning action

Inventive Principle:
Principle #24Intermediary (Mediator)

3Manufacturing precision

If a double tube structure is used to control flow rate, then the pressure deviation is reduced, but the device complexity increases

Engineering Contradiction:
Improvepressure uniformityVSAvoidapparatus structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The inner tube is nested within the outer tube, creating a compact double-tube structure. This nesting arrangement allows for complex fluid distribution functionality to be achieved within a relatively simple overall form factor, reducing the apparent device complexity while maintaining precise pressure control capabilities

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The double tube structure effectively reduces pressure deviations on the thin film, preventing folding and breakage by maintaining a consistent flow pattern and ensuring the film is cleaned uniformly, thus enhancing the reliability of the thin film cleaning process.

Implementation Method 1

an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit

Methodology Applied
Scientific EffectFluid flow through holes:

Implementation Method 2

an outer tube arranged to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside

Methodology Applied
Scientific EffectFluid injection through slots:

Implementation Method 3

The cleaning fluid injected from the holes 8 gives a predetermined pressure to the surface of the thin film 4 moving in association with the immersion liquid 3. This pressure is at the level allowing impurities present on the surface of the thin film 4 to be removed

Methodology Applied
Scientific EffectPressure application for cleaning:

Data Source

PatentEP2606990B1Fluid supplying apparatus and system and method for cleaning thin film using the same
Publication Date: 2022.10.05 LG CHEM LTD
  • EP2606990B1 patent drawingFigure 1~2
  • EP2606990B1 patent drawingFigure 3~5
  • EP2606990B1 patent drawingFigure 6~8

AI summary

A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.