Double Tube Fluid Distributor for Uniform Thin Film Cleaning
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Solution Overview
Problem
Conventional thin film cleaning systems apply irregular pressure to the film due to high flow rates of cleaning fluid, leading to potential film folding, drooping, and breakage during the cleaning process.
Innovation Solution
A fluid supplying apparatus with a double tube structure, featuring an inner tube with holes and an outer tube with slots, is used to control and adjust the flow rate and flux of the cleaning fluid, reducing pressure deviations and ensuring uniform pressure application.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a single tube structure with holes is used to inject cleaning fluid, then the fluid injection capability is provided, but the flow rate becomes too high causing irregular pressure and film damage
Solution Approach 1:
The single tube structure is divided into an inner tube and an outer tube, creating a segmented fluid distribution system. The inner tube distributes fluid to multiple injection points, while the outer tube provides additional flow control, thereby reducing the high flow rate that causes film damage while maintaining effective cleaning fluid injection
2Speed
If the cleaning fluid flows faster through the holes, then the injection pressure increases, but the flow pattern becomes complicated causing irregular pressure distribution
Solution Approach 1:
The outer tube acts as an intermediary structure between the inner tube and the cleaning bath. It receives fluid from the inner tube and distributes it through its own openings, mediating the flow to create a more stable and uniform pressure distribution on the film while maintaining effective cleaning action
3Manufacturing precision
If a double tube structure is used to control flow rate, then the pressure deviation is reduced, but the device complexity increases
Solution Approach 1:
The inner tube is nested within the outer tube, creating a compact double-tube structure. This nesting arrangement allows for complex fluid distribution functionality to be achieved within a relatively simple overall form factor, reducing the apparent device complexity while maintaining precise pressure control capabilities
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The double tube structure effectively reduces pressure deviations on the thin film, preventing folding and breakage by maintaining a consistent flow pattern and ensuring the film is cleaned uniformly, thus enhancing the reliability of the thin film cleaning process.
Implementation Method 1
an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit
Implementation Method 2
an outer tube arranged to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside
Implementation Method 3
The cleaning fluid injected from the holes 8 gives a predetermined pressure to the surface of the thin film 4 moving in association with the immersion liquid 3. This pressure is at the level allowing impurities present on the surface of the thin film 4 to be removed
Data Source
Figure 1~2
Figure 3~5
Figure 6~8
AI summary
A fluid supplying apparatus includes an inner tube having a plurality of holes for distributing a fluid supplied from a supply unit, and an outer tube arranged coaxially or non-coaxially with the inner tube to surround the inner tube and having a plurality of slots for injecting the fluid distributed therein from the holes to the outside. The outer tube substantially has the same length as the inner tube. The fluid supplying apparatus may be used for a thin film cleaning system or method.