Double Worm Gear Vibration Suppression in Crystal Pulling

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Solution Overview

Problem

Existing apparatuses for pulling single crystals of semiconductor material using the Czochralski method fail to provide an ultra low-jitter environment, particularly inadequately suppressing longwave vibrations, especially at low rotary speeds and during changes in rotational direction of the crucible shaft.

Innovation Solution

The apparatus employs double worm gears between the drives and the rotating pulling and crucible shafts, with drives mounted laterally and rigidly on housing plates, and coupling bellows for electrical isolation, to ensure low-jitter operation and suppress longwave vibrations.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single worm gear is used between the drive and the pulling shaft, then the device complexity is reduced, but the jitter and longwave vibrations increase

Engineering Contradiction:
Improvegear structure complexityVSAvoidjitter suppression performance
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The single worm gear is segmented into a double worm gear system with two sequential worm gears. This segmentation divides the rotational transmission into two stages, with each worm gear contributing to vibration suppression. The first worm gear reduces vibrations from the drive, and the second worm gear further reduces residual vibrations, achieving ultra low-jitter operation while maintaining manageable device complexity through modular design.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The double worm gear system exploits mechanical vibration principles by using the inherent damping characteristics of worm gear meshing. The double reduction stage creates multiple vibration isolation zones, where each worm gear stage absorbs and dissipates vibrational energy through its meshing action, thereby suppressing longwave vibrations and jitter in the pulling shaft rotation.

Inventive Principle:
Principle #18Mechanical vibration

2Device complexity

If a single worm gear is used between the drive and the crucible shaft, then the device complexity is reduced, but the longwave vibrations are not adequately suppressed

Engineering Contradiction:
Improvegear structure complexityVSAvoidlongwave vibrations
Core Design Contradiction:
Device complexityVSObject-affected harmful factors

Solution Approach 1:

The single worm gear for the crucible shaft is replaced with a double worm gear system. This segmentation allows the first worm gear to handle the primary vibration reduction from the drive, and the second worm gear to provide additional vibration isolation specifically targeting longwave vibrations. The dual-stage approach creates cumulative vibration suppression效果 without excessive complexity increase.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The double worm gear system utilizes mechanical vibration damping through two sequential meshing stages. Each worm gear stage acts as a vibration filter, with the first stage capturing high-frequency vibrations and the second stage suppressing lower-frequency longwave vibrations. This multi-stage vibration filtering effectively eliminates harmful longwave vibrations that affect crucible shaft operation and crystal growth quality.

Inventive Principle:
Principle #18Mechanical vibration

3Device complexity

If conventional single-stage worm gears are used, then the apparatus is simpler, but the ultra low-jitter environment required for single-crystalline growth is not achieved

Engineering Contradiction:
Improverotational drive structureVSAvoidsingle crystal growth quality
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

Both the pulling shaft and crucible shaft drives are segmented into double worm gear systems. This segmentation creates a hierarchical vibration suppression architecture where the first worm gear in each system handles coarse vibration reduction, and the second worm gear provides fine-tuned jitter suppression. The result is an ultra low-jitter environment essential for high-quality single crystal growth, achieved through systematic division of vibration control functions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The double worm gear systems employ mechanical vibration damping principles to create the ultra low-jitter environment required for single-crystalline growth. The two-stage worm gear meshing in each system creates multiple vibration isolation barriers, progressively filtering out rotational irregularities and jitter. This mechanical vibration suppression ensures the precise rotational control needed for defect-free crystal growth, directly linking the gear structure to manufacturing precision.

Inventive Principle:
Principle #18Mechanical vibration

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves low-jitter operation, is space-saving, and maintenance-friendly, effectively suppressing longwave vibrations and ensuring stable semiconductor crystal growth.

Implementation Method 1

a double worm gear between a drive and the pulling shaft

Methodology Applied
Scientific EffectWorm gear mechanism: Worm Drive

Implementation Method 2

a further double worm gear between a further drive and the crucible shaft

Methodology Applied
Scientific EffectWorm gear mechanism: Worm Drive

Data Source

PatentUS12116694B2Device and method for pulling a single crystal of semiconductor material
Publication Date: 2024.10.15 SILTRONIC AG
  • US12116694B2 patent drawing
  • US12116694B2 patent drawing

AI summary

An apparatus is configured to pull a single crystal of semiconductor material from a melt contained in a crucible. The apparatus includes: a rotatable pulling shaft; a rotatable crucible shaft; a double worm gear between a drive and the pulling shaft; and a further double worm gear between a further drive and the crucible shaft.