Drain Cup Circular Flow for Liquid Processing
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Solution Overview
Problem
Existing liquid processing apparatuses face challenges in swiftly discharging process liquids from drain cups, particularly when switching between different types of liquids, leading to prolonged drainage times and mixed liquid drainage.
Innovation Solution
A liquid processing apparatus with a circular flow generation element integrated into the drain cup, which creates a circular flow to swiftly lead process liquids to the drain port, combined with an annular drain cup design and a downward slope to facilitate drainage, preventing mist from bouncing back onto the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If an annular drain cup is used to receive process liquid discharged from the rotary cup, then the process liquid can be collected, but the drainage time is prolonged and liquids of different kinds may mix
Solution Approach 1:
The drain cup is divided into multiple independent drainage regions separated by partition walls. Each region has its own drain port, allowing different process liquids to be drained simultaneously through different paths, eliminating mixing and reducing overall drainage time
Solution Approach 2:
The system switches from a static drain cup to a dynamic drainage system where the rotary cup's rotation creates centrifugal force to move liquids outward, and the multi-region design allows adaptive drainage based on liquid type and volume
2Speed
If a surrounding member (cup) is used to guide downward the process liquid thrown off from the wafer, then the process liquid is swiftly drained, but part of the process liquid bounces back to the wafer as mist and generates defects
Solution Approach 1:
The drain cup bottom is designed with a downward slope instead of being flat, creating a gravitational gradient that directs liquids toward the drain port. This dimensional change in the bottom surface geometry improves drainage efficiency while controlling liquid flow paths to prevent mist generation
Solution Approach 2:
The inclined guide portion acts as an intermediary between the horizontal eaves portion and the drain port, smoothly directing liquids downward and outward while preventing direct impact that would generate mist. The guide portion mediates the liquid flow to maintain controlled drainage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus enables swift discharge of process liquids from the drain cup, simplifies the switching process between different liquids, and prevents mixing of liquids, thereby improving efficiency and reducing contamination risks.
Implementation Method 1
a circular flow generation element configured to generate a circular flow within the drain cup when the rotary cup and the substrate holding member are rotated, so that the circular flow leads the process liquid within the drain cup to the drain port
Implementation Method 2
The drain cup may include a downward slope extending in an annular direction to cause the process liquid to flow into the drain port
Implementation Method 3
an annular rotary cup configured to surround the substrate held on the substrate holding member and to rotate along with the substrate
Data Source
AI summary
A liquid processing apparatus includes a substrate holding member configured to rotate along with a substrate held thereon in a horizontal state; an annular rotary cup configured to surround the substrate held on the substrate holding member and to rotate along with the substrate; a rotation mechanism configured to integrally rotate the rotary cup and the substrate holding member; and a liquid supply mechanism configured to supply a process liquid onto the substrate. The apparatus further includes an annular drain cup configured to receive the process liquid discharged from the rotary cup, and provided with a drain port; and a circular flow generation element configured to generate a circular flow within the drain cup when the rotary cup and the substrate holding member are rotated, such that the circular flow serves to lead the process liquid within the drain cup to the drain port.