Drainage for temperature and humidity controlling system

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Solution Overview

Problem

In semiconductor manufacturing, existing temperature and humidity control systems face challenges in maintaining smooth fluid flow and preventing gas lockages, which can disrupt the temperature and humidity control of heat-producing equipment, affecting the quality of products.

Innovation Solution

A temperature and humidity controlling system comprising a condenser, tank, pipe, and air duct, where the cooled cooling fluid flows between the pipe and air duct, allowing gas to escape through the air duct while preventing fluid accumulation, ensuring continuous fluid flow and avoiding gas lockages.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If cooled cooling fluid flows through a conventional pipe system, then temperature control is achieved, but gas lockages occur and disrupt fluid flow

Engineering Contradiction:
Improvefluid flow continuityVSAvoidgas lockage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The pipe system is segmented into multiple sections with drainage devices installed at low points. This segmentation allows gas pockets to be isolated and drained from specific sections rather than affecting the entire system, maintaining continuous fluid flow while eliminating gas lockage disruptions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The drainage device acts as an intermediary component between the pipe and the environment. It provides a controlled pathway for gas to escape while preventing liquid leakage, serving as a mediator that resolves the conflict between maintaining sealed temperature control and allowing gas venting.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-generated harmful factors

If conventional drainage methods are used, then gas can escape, but cooling fluid may leak along with the gas

Engineering Contradiction:
Improvegas accumulationVSAvoidcooling fluid leakage
Core Design Contradiction:
Object-generated harmful factorsVSLoss of substance

Solution Approach 1:

The drainage device maintains a homogeneous sealing interface between the pipe interior and exterior. The seal ensures that the same conditions apply throughout the drainage opening, preventing differential pressure from causing fluid leakage while still allowing gas to pass through when pressure exceeds the seal's holding capacity.

Inventive Principle:
Principle #33Homogeneity

Solution Approach 2:

The drainage device exploits the parameter difference between gas and liquid phases. By designing the seal with specific pressure characteristics, it allows the lower-density gas phase to escape while the higher-density liquid phase remains contained, utilizing phase parameter differences to achieve selective drainage.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If the drainage device is installed at every low point, then gas lockage is prevented, but device complexity increases

Engineering Contradiction:
Improvetemperature and humidity controlVSAvoidnumber of drainage devices
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The drainage device is designed as a universal component that can be installed at any low point in the pipe system. This multi-functional design allows a single standardized device to serve multiple drainage locations, reducing overall system complexity compared to using different specialized components at each location.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Rather than installing drainage devices at every possible low point, the system uses partial action by strategically placing devices only at critical locations where gas accumulation would most severely impact temperature and humidity control. This selective approach balances reliability improvement with complexity minimization.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system effectively controls temperature and humidity by maintaining smooth fluid circulation and preventing gas lockages, ensuring consistent performance of heat-producing equipment.

Implementation Method 1

a condenser configured for cooling down a cooling fluid flowing out from a heat producing equipment

Methodology Applied
Scientific EffectHeat exchange: Heat Exchanger

Implementation Method 2

guiding the cooled cooling fluid to flow downwards between the inner surface of the pipe and the outer surface of the air duct

Methodology Applied
Scientific EffectGravity: Gravitation

Data Source

PatentUS11035619B2Drainage for temperature and humidity controlling system
Publication Date: 2021.06.15 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11035619B2 patent drawing
  • US11035619B2 patent drawing
  • US11035619B2 patent drawing

AI summary

A drainage device includes a tank, a pipe and an air duct. The tank has a base plate and at least one first wall. The first wall is disposed on the base plate. The base plate and the first wall define a space. The pipe defines a channel. The pipe connects with the base plate. The channel communicates with the space. The air duct is disposed partially in the space and partially in the channel. There exists at least one gap between an outer surface of the air duct and an inner surface of the pipe.