Drawing Data Correction for Substrate Transformation Accuracy
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Solution Overview
Problem
Existing drawing apparatuses struggle to accurately correct drawing data for complex substrate transformations, leading to inaccuracies in pattern enlargement, reduction, and position changes during the drawing process.
Innovation Solution
A data correcting apparatus and method that adjusts drawing data to transform a quadrangular drawing area from an actual position to an ideal position by using a combination of scaling and sloping corrections, ensuring the corrected outline is a parallelogram with sides matching the actual outline, thereby improving accuracy in pattern drawing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional data correction operations are used based on mark distances, then the correction process is simple, but the accuracy is insufficient for complex substrate transformations
Solution Approach 1:
The correction process is divided into two distinct stages: first generating a parallelogram-shaped intermediate drawing area that preserves two neighboring sides of the actual outline, then transforming this intermediate area to match the ideal outline. This segmentation allows each stage to address specific transformation aspects, improving overall accuracy while maintaining manageable complexity
Solution Approach 2:
The invention performs preliminary correction by creating a parallelogram-shaped intermediate drawing area before final transformation to the ideal outline. This preliminary action establishes a structured intermediate state that facilitates more accurate final positioning and reduces cumulative errors
2Manufacturing precision
If the drawing area is directly transformed to the ideal outline, then the correction is comprehensive, but the shape distortion increases during transformation
Solution Approach 1:
The invention performs preliminary correction by creating a parallelogram-shaped intermediate drawing area that preserves two neighboring sides of the actual outline before final transformation to the ideal outline. This preliminary action establishes a structured intermediate state that facilitates more accurate final positioning while minimizing cumulative shape distortion
Solution Approach 2:
Different regions of the drawing area are treated differently during transformation. The parallelogram intermediate state preserves local geometric properties (two neighboring sides) while allowing other regions to be adjusted, maintaining local shape quality throughout the correction process
Data Source
AI summary
A data correcting apparatus is for correcting drawing data representing a drawing pattern included in a quadrangular drawing area of a drawing subject. The correction process is based on an ideal position and an actual position of the drawing area on the drawing subject. An actual outline is an outline of the drawing area in the actual position, and an ideal outline is an outline of the drawing area in the ideal position. The data correcting apparatus includes a first data corrector that corrects the drawing data to be first corrected drawing data. A first corrected outline is an outline of the drawing area represented by the first corrected drawing data, and is a parallelogram which has two neighboring sides that are the same as the sides of the actual outline. Further, the parallelogram has a shape closer to that of the ideal outline than the actual outline.