Dressing Ring Integration for Simultaneous Grinding and Stone Dressing
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Solution Overview
Problem
The inefficiency in the manufacturing process of semiconductor device chips due to the need for frequent substitution work between the workpiece and dressing board during grinding stone dressing, which decreases the grinding efficiency.
Innovation Solution
A dressing ring with a ring-shaped dressing member and support plate that allows concurrent holding of the workpiece and dressing member on the chuck table, enabling simultaneous grinding and dressing without the need for substitution work.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substitution work is performed between workpiece and dressing board, then dressing of grinding stones can be done, but grinding efficiency decreases due to time loss
Solution Approach 1:
The patent merges the workpiece and dressing board into a single integrated structure where the dressing board is positioned at the center of the workpiece. This allows both grinding and dressing operations to occur simultaneously on the same chuck table without requiring substitution work, thereby eliminating time loss while maintaining the grinding ability of the stones.
Solution Approach 2:
By integrating the dressing board within the workpiece structure, the system enables continuous operation where grinding of new workpieces and dressing of grinding stones can proceed simultaneously without interruption. The useful action continues uninterrupted as the dressing board remains in position on the chuck table throughout the grinding process.
2Reliability
If substitution work is performed frequently, then grinding stones can be dressed to maintain their ability, but time consumption increases
Solution Approach 1:
The dressing board is merged with the workpiece as a single integrated component. The workpiece has a through-hole structure that accommodates the dressing board, allowing both components to be held simultaneously on the chuck table. This eliminates the need for substitution work and the associated time loss while ensuring grinding stones can be dressed frequently to maintain their grinding ability.
Solution Approach 2:
The dressing board is prepared and positioned in advance as part of the workpiece structure before grinding begins. This preliminary arrangement ensures that the dressing function is already in place and requires no additional setup or substitution operations, thereby eliminating time consumption associated with frequent dressing operations.
3Reliability
If dressing board is held on chuck table, then grinding stones can be dressed, but workpiece cannot be ground simultaneously
Solution Approach 1:
The workpiece and dressing board are merged into a single operational unit. The workpiece is designed with a through-hole that accommodates the dressing board, allowing both components to be clamped simultaneously on the chuck table. This integration simplifies the operational complexity by eliminating the need to replace the workpiece with a dressing board, as both functions coexist in the same configuration.
Solution Approach 2:
The integrated workpiece-dressing board structure serves multiple functions simultaneously. The outer region of the workpiece is used for grinding operations while the central dressing board performs stone dressing. This multi-functionality allows both grinding and dressing to occur in the same operational setup without increasing device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Eliminates the time required for substitution work between the workpiece and dressing board, thereby enhancing the grinding efficiency and maintaining the grinding ability of the stones.
Implementation Method 1
holding a workpiece under suction on a chuck table
Data Source
AI summary
A dressing ring includes a ring-shaped dressing member for dressing a processing stone. Preferably, the dressing member has an opening in which a workpiece is arranged when the workpiece is ground. Also preferably, the dressing ring further includes a ring-shaped support plate having an upper surface on which the dressing member is fixed. In addition, a grinding method of the workpiece includes the steps of holding the ring-shaped dressing member on a holding surface of a chuck table, holding the workpiece in the opening of the dressing member such that a back surface of the workpiece is located higher than the upper surface of the dressing member, grinding the workpiece by grinding stones of a grinding wheel, and dressing the grinding stones with the dressing member on the holding surface.