Driving Profile Generation for Low-Vibration Lithography Motion
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Solution Overview
Problem
Existing lithography apparatuses face challenges in reducing abrupt force changes between acceleration and deceleration periods in S-shaped acceleration profiles, leading to vibrations and increased settling times, which affect throughput.
Innovation Solution
A method to generate a driving profile by adjusting the length of the constant speed period between acceleration and deceleration periods, ensuring the absolute value of Jerk does not include zero portions, thereby reducing steep force changes and vibrations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of time
If an S-shaped acceleration profile is used, then settling time is reduced, but abrupt force changes occur between acceleration and deceleration periods causing vibrations
Solution Approach 1:
The patent changes the Jerk parameter profile from a conventional S-shaped acceleration profile to a modified profile where Jerk changes continuously without zero portions. This parameter modification eliminates abrupt force changes while maintaining the shortened settling time benefit, resolving the contradiction between fast settling and vibration reduction.
Solution Approach 2:
The patent introduces a dynamic adjustment mechanism that modifies the acceleration profile based on real-time conditions. By making the Jerk profile dynamic and continuous rather than static and discrete, the system achieves smooth transitions between acceleration and deceleration periods, preventing vibrations while maintaining fast settling.
2Productivity
If the constant speed period is shortened to reduce settling time, then throughput improves, but abrupt force changes occur between acceleration and deceleration periods
Solution Approach 1:
The patent modifies the Jerk parameter profile to eliminate zero portions during transitions. By changing how Jerk evolves over time - specifically ensuring it passes through values without becoming zero - the system can use shorter constant speed periods for improved throughput while avoiding abrupt force changes that cause vibrations.
Data Source
AI summary
The present invention provides a generating method of generating a driving profile for driving an object, the method comprising: obtaining a target driving amount by which the object is to be driven by the driving profile; creating, based on the target driving amount, a provisional profile including an acceleration period in which the object is accelerated so as to change an acceleration nonlinearly and a deceleration period in which the object is decelerated so as to change a deceleration nonlinearly; and determining the driving profile based on the provisional profile.