DRM-DRC Equivalence Checking for Accurate Layout Rule Verification

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Solution Overview

Problem

Mis-transformation of design rule manual (DRM) data to design rule checking (DRC) data can lead to incorrect verification of semiconductor device layouts, as the transformation process is prone to errors, affecting the accuracy of design rule compliance checks.

Innovation Solution

A method and system are implemented to determine the equivalence of DRM and DRC data by transforming both into a common data structure format and using a data structure node comparison model, such as a parser, formula model, Boolean algebra, machine learning, NLP, or table look-up model, to ensure accurate transformation and equivalence checking.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If an experienced operator manually transforms DRM data to DRC data, then the transformation can be performed with human judgment and adaptability, but mis-transformation errors can occur affecting accuracy

Engineering Contradiction:
Improvehuman judgment in transformationVSAvoidtransformation accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent introduces an equivalence checking system that acts as an intermediary between DRM and DRC data. The system transforms both DRM data and DRC data into a common data structure format, then compares them using a comparison model to verify equivalence. This intermediary checking mechanism detects transformation errors without replacing the manual transformation process, thus maintaining adaptability while improving accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent implements a feedback mechanism where the equivalence checking results are fed back to identify transformation errors. The system generates equivalence check results that indicate whether the DRM and DRC data are equivalent, providing feedback that can be used to correct mis-transformations and improve future transformation accuracy.

Inventive Principle:
Principle #23Feedback

2Ease of operation

If manual transformation by experienced operators is used, then flexibility in handling complex DRM data is maintained, but transformation errors and reduced verification accuracy occur

Engineering Contradiction:
Improveflexibility in transformationVSAvoidverification accuracy
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The equivalence checking system serves as an intermediary verification layer that does not interfere with the manual transformation process. It independently transforms DRM data to a common format, compares it with the operator-transformed DRC data, and provides feedback on equivalence. This maintains operator flexibility while ensuring verification accuracy through automated checking.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system enables self-verification where the transformation process validates its own correctness. By transforming DRM data independently to a common format and comparing it with the DRC data, the system performs self-checking to detect transformation errors, allowing the manual transformation process to continue with built-in verification.

Inventive Principle:
Principle #25Self-service

3Productivity

If DRM data is transformed to DRC data without equivalence checking, then the process is simpler and faster, but incorrect verification of semiconductor device layouts occurs

Engineering Contradiction:
Improvetransformation speedVSAvoidlayout verification accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The patent applies partial action by implementing equivalence checking only for critical transformation aspects. The system transforms DRM and DRC data to a common format and performs comparison checks, focusing on verifying equivalence without requiring complete re-verification of all transformation details. This provides sufficient accuracy improvement while maintaining reasonable productivity.

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS20250348646A1Method and system for determining equivalence of design rule manual data and design rule checking data
Publication Date: 2025.11.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250348646A1 patent drawing
  • US20250348646A1 patent drawing
  • US20250348646A1 patent drawing

AI summary

The present disclosure provides a method and a system for determining the equivalence of the DRM data set and the DRC data set. The system retrieves a DRM data set and a DRC data set, and transforms the DRM data set and the DRC data set into a first data structure node and a second data structure node respectively. The system determines whether the first data structure node and the second data structure node are equivalent according to a data structure node comparison model.