Distributed DrMOS Gate Drive for Uniform Switching and Low Inductance

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Solution Overview

Problem

Conventional DrMOS devices face issues with large gate contact pads that occupy significant space, non-uniform gate impedance leading to non-uniform switching, high parasitic inductance due to bond wires, and structural limitations from lead frames and clips, which increase device size and reduce reliability.

Innovation Solution

Implementing a distributed gate drive and distributed contact placement in wafer or panel level packaging, utilizing a redistribution layer (RDL) with plated vias to evenly distribute gate and source connections, reducing the need for large pads and bond wires, and incorporating trench capacitors and split FET structures to enhance switching uniformity and robustness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If large gate contact pads are used to ensure sufficient connection area, then reliable electrical connection is achieved, but device area increases and active area is wasted

Engineering Contradiction:
Improveconnection reliabilityVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The gate contact pad is divided into multiple smaller contact regions distributed across the gate structure. Instead of using a single large pad, the patent implements multiple gate contacts that are distributed across the gate, allowing current to flow through multiple paths. This segmentation reduces the area occupied by gate contacts while maintaining reliable electrical connection through distributed contact points.

Inventive Principle:
Principle #1Segmentation

2Reliability

If bond wires are used to connect chips within the package, then electrical connection is achieved, but parasitic inductance increases

Engineering Contradiction:
Improveelectrical connectionVSAvoidparasitic inductance
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and eliminates the bond wire connection method from the package structure. By transitioning to a wafer-level integrated approach where chips are connected through the substrate plane rather than through air-based bond wires, the harmful parasitic inductance inherent to bond wires is removed. The connection is reimagined without the intermediate bond wire element that causes inductance.

Inventive Principle:
Principle #2Taking out (Extraction)

3Strength

If lead frame and clip structure are used to hold chips, then mechanical support is achieved, but device size increases

Engineering Contradiction:
Improvemechanical supportVSAvoiddevice size
Core Design Contradiction:
StrengthVSArea of stationary object

Solution Approach 1:

The patent merges the mechanical support function into the wafer substrate itself. Instead of using separate lead frames and clips as additional structural elements, the substrate is designed to provide both electrical connection and mechanical support functions. The chips are mounted directly on the substrate which provides inherent mechanical strength, eliminating the need for separate support structures and reducing overall device size.

Inventive Principle:
Principle #5Merging (Combining)

4Device complexity

If single large gate pad is used, then connection is simplified, but gate impedance becomes non-uniform causing non-uniform switching

Engineering Contradiction:
Improveconnection complexityVSAvoidswitching uniformity
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The gate contact is segmented into multiple distributed contact points across the gate structure. This segmentation creates multiple parallel current paths that distribute the gate current uniformly across the gate width. The distributed gate contacts ensure uniform gate impedance and uniform electric field distribution, which enables uniform switching behavior across the entire device while maintaining manageable connection complexity through standardized contact patterns.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20250113620A1Distributed Gate Drive for DrMOS
Publication Date: 2025.04.03 ALPHA & OMEGA SEMICON INT LP
  • US20250113620A1 patent drawing
  • US20250113620A1 patent drawing
  • US20250113620A1 patent drawing

AI summary

A transistor device comprising a semiconductor substrate composition a first gate electrode material disposed over a portion of a surface of the substrate composition wherein the first gate electrode material includes a first gate electrode contact region near at least one edge of the substrate composition. A gate insulating material is located over the first gate electrode material including two or more first gate vias through the gate insulating material in the first gate electrode contact region wherein the two or more first gate vias expose the first gate electrode material. A transistor device package includes a gate controller integrated circuit including a first transistor gate driver output node. A first gate conductive redistribution material connects the first gate electrode material of the first transistor device to the output node of the gate controller integrated circuit through the two or more first gate vias.