Droplet Accelerating Assembly for EUV Lithography
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Solution Overview
Problem
Existing EUV lithography systems face challenges in efficiently generating EUV light due to limitations in droplet speed and internal pressure adjustments, leading to reduced efficiency and potential physical damage to the droplet generator, as well as interference between plasma-generated tin droplets.
Innovation Solution
A droplet accelerating assembly is introduced, comprising a droplet accelerating chamber with a pressure controlling apparatus, a droplet electrifying apparatus, and a droplet accelerating apparatus, which adjusts internal pressure and applies electric fields to accelerate droplets independently of the vessel's pressure, minimizing interference and enhancing droplet speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If droplet ejection frequency is increased to improve productivity, then EUV light generation efficiency is improved, but droplet speed becomes insufficient leading to plasma interference and reduced manufacturing precision
Solution Approach 1:
The system divides the droplet control process into separate functional stages: a droplet generator for ejection, a droplet accelerating assembly with independent pressure control for speed adjustment, and a vessel for plasma generation. This segmentation allows each component to be optimized independently, enabling high ejection frequency while maintaining precise droplet positioning through the intermediate acceleration stage.
Solution Approach 2:
The droplet accelerating assembly acts as an intermediary component between the droplet generator and the vessel. It receives droplets at one speed from the generator, then independently accelerates them to the required speed before entering the vessel, thereby decoupling the speed requirements of the two components and preventing plasma interference.
2Speed
If internal pressure of the vessel is adjusted to control droplet speed, then droplet velocity is improved, but the droplet generator is exposed to harmful pressure conditions leading to physical damage
Solution Approach 1:
The pressure control function is segmented from the vessel and assigned to a dedicated droplet accelerating assembly. The assembly includes a pressure controlling apparatus that independently adjusts internal pressure only within the accelerating chamber, keeping the vessel pressure constant and safe for the droplet generator.
Solution Approach 2:
The droplet accelerating assembly serves as a protective intermediary that isolates the droplet generator from harmful pressure conditions. Pressure adjustment occurs in the accelerating assembly rather than the vessel, shielding the generator from pressure-induced damage while still enabling droplet speed control.
3Manufacturing precision
If droplet speed is increased to reduce plasma interference, then manufacturing precision is improved, but the droplet generator must operate under more extreme conditions increasing risk of physical damage
Solution Approach 1:
The system segments the droplet handling process into distinct zones: a gentle ejection zone in the droplet generator, an acceleration zone in the droplet accelerating assembly where speed is increased, and a final delivery zone in the vessel. This allows high-speed operation only where necessary, protecting the generator from extreme conditions while achieving the required droplet velocity for precise positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution increases the efficiency of EUV light generation by accelerating droplets, preventing physical damage to the droplet generator, and reducing interference between plasma-generated droplets, thereby improving the overall performance of the EUV lithography process.
Implementation Method 1
a droplet electrifying apparatus disposed in the droplet accelerating chamber and configured to electrify the droplet ejected by the droplet generator
Implementation Method 2
a droplet accelerating apparatus disposed in the droplet accelerating chamber and configured to accelerate the droplet electrified by the droplet electrifying apparatus
Implementation Method 3
a pressure controlling apparatus connected to the flow path of the droplet accelerating chamber and configured to adjust internal pressure of the droplet accelerating chamber
Data Source
AI summary
A droplet accelerating assembly includes an acceleration chamber extending in a first direction parallel to an ejection direction of the droplet, the acceleration chamber having a first side connected to the droplet generator, a second side opposite the first side in the first direction, the second side including a discharge hole, and a fluid flow path, a pressure controller connected to the fluid flow path of the acceleration chamber, the pressure controller being configured to adjust an internal pressure of the acceleration chamber, an electrifier in the acceleration chamber, the electrifier being configured to electrify the droplet ejected by the droplet generator into an electrified droplet, and an accelerator in the acceleration chamber, the accelerator being configured to accelerate the electrified droplet.