Droplet Deposition Head Multilayer Passivation Coating

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Solution Overview

Problem

Existing droplet deposition heads face issues with fluid penetration and electrode corrosion due to inadequate passivation coatings, particularly in high-aspect-ratio fluid chambers, leading to reduced operational lifetime and inefficiencies in inkjet printheads.

Innovation Solution

A passivation coating comprising a laminate of an inorganic insulating layer deposited by atomic layer deposition and an organic insulating layer by plasma-enhanced chemical vapor deposition, with misaligned defects at the interface, providing a longer pathway for ionic species migration and improved resistance to field-driven penetration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a single-layer passivation coating is used on electrodes in high-aspect-ratio fluid chambers, then the coating process is simple, but fluid penetration and electrode corrosion occur leading to reduced operational lifetime

Engineering Contradiction:
Improveoperational lifetimeVSAvoidpassivation coating structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies a composite passivation coating consisting of multiple layers with different materials and properties. The first layer is an inorganic insulating layer deposited by atomic layer deposition, and the second layer is an organic insulating layer deposited by plasma-enhanced chemical vapor deposition. This composite structure provides superior protection against fluid penetration and electrode corrosion compared to single-layer coatings, thereby extending operational lifetime while managing the increased structural complexity.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The passivation coating is segmented into multiple distinct layers, each with specific functions. The first inorganic layer provides a dense barrier against ionic species, while the second organic layer provides additional protection and chemical resistance. This segmentation allows each layer to optimize its protective function, preventing fluid penetration and corrosion that would occur with a single-layer coating.

Inventive Principle:
Principle #1Segmentation

2Volume of moving object

If the fluid chamber has a high aspect ratio, then the droplet deposition head can be compact, but the passivation coating becomes inadequate allowing fluid penetration

Engineering Contradiction:
Improvefluid chamber volumeVSAvoidpassivation coating effectiveness
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The composite passivation coating structure is specifically designed to address the challenges of high-aspect-ratio fluid chambers. The combination of inorganic and organic insulating layers creates a multi-barrier system that is highly effective at preventing fluid penetration even in compact, high-aspect-ratio chamber geometries where coating uniformity and effectiveness are difficult to achieve.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent transitions from a single-layer coating approach to a multi-layer coating approach, adding dimensional complexity to the passivation structure. This dimensional change from one layer to multiple layers provides enhanced protection against fluid penetration in high-aspect-ratio chambers by creating multiple barriers that ionic species must traverse.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If a thicker passivation coating is used to prevent fluid penetration, then corrosion resistance improves, but the coating thickness increases reducing chamber space

Engineering Contradiction:
Improvecorrosion resistanceVSAvoidchamber space
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The composite coating structure achieves superior corrosion resistance with optimized total thickness by combining materials with different protective properties. The inorganic layer provides a dense barrier with excellent adhesion, while the organic layer provides chemical resistance and additional barrier properties. This composite approach achieves better protection per unit thickness compared to single-layer coatings, maintaining chamber space while improving corrosion resistance.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The multilayer passivation coating significantly enhances the operational lifetime of droplet deposition heads by preventing fluid penetration and corrosion, allowing for the use of a wider variety of fluids across a broader pH range and higher ion conductivity.

Implementation Method 1

a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting an electrode and an organic insulating layer overlying the inorganic insulating layer

Methodology Applied
Scientific EffectAtomic layer deposition:

Implementation Method 2

a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting an electrode and an organic insulating layer overlying the inorganic insulating layer

Methodology Applied
Scientific EffectPlasma-enhanced chemical vapor deposition: Plasma Enhanced Chemical Vapour Deposition

Implementation Method 3

a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to generate a pressure in the chamber

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Data Source

PatentUS10583651B2Droplet deposition head
Publication Date: 2020.03.10 XAAR TECH LTD
  • US10583651B2 patent drawing
  • US10583651B2 patent drawing
  • US10583651B2 patent drawing

AI summary

A droplet deposition head having a fluid chamber connected to a droplet ejection nozzle and to a reservoir for the fluid, and a piezoelectric actuator element formed at least in part by a fluid chamber wall having an electrode thereon, which element is displaceable in response to a drive voltage to generate a pressure in the chamber to eject a droplet of fluid from the chamber through the nozzle wherein the electrode is provided with a passivation coating which comprises, at least in part, a laminate comprising an inorganic insulating layer nearest to or contacting the electrode and an organic insulating layer overlying the inorganic insulating layer wherein defects in the insulating layers tend to be misaligned at the interface there between and wherein the inorganic insulating layer has thickness less than or equal to 500 nm and the organic insulating layer has a thickness less than 3 μm.