Droplet Discharge Nozzle Correction for Color Filter Yield

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Solution Overview

Problem

Existing drawing systems using the droplet discharge method face challenges with nozzle blockage, flight deviation, and other defects in liquid material discharge, making it difficult to achieve stable and accurate deposition of droplets for color filters and organic EL elements.

Innovation Solution

A drawing system that ranks nozzles based on discharge characteristics, generates corrected arrangement information to adjust for defects such as landing position deviation and discharge quantity abnormalities, and uses an imaging mechanism to update nozzle information for precise droplet placement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a droplet discharge method is used to form pixel formation elements, then high-resolution patterning is achieved, but nozzle blockage and flight deviation occur causing discharge defects

Engineering Contradiction:
Improvedroplet placement accuracyVSAvoiddischarge stability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The system performs preliminary detection of nozzle discharge characteristics by discharging test droplets onto a detection object before actual production. The detected information about each nozzle's performance (blockage, flight deviation, discharge quantity) is stored and used to generate corrected arrangement information that compensates for potential discharge defects during normal operation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system establishes a feedback loop where droplet landing positions are detected and compared with intended positions, nozzle discharge characteristics are measured and stored, and this information is fed back to generate corrected arrangement information. This feedback mechanism continuously improves droplet placement accuracy by compensating for nozzle-specific defects.

Inventive Principle:
Principle #23Feedback

2Productivity

If dot deviation detection is added to the droplet discharge device, then product yield is enhanced, but device complexity increases

Engineering Contradiction:
Improveproduct yieldVSAvoidsystem complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent introduces an intermediary detection object (such as a recording paper or detection substrate) that facilitates the measurement of droplet landing positions without interfering with the actual production process. This intermediary enables the system to detect and measure nozzle performance characteristics while maintaining separation between detection and production functions.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The system creates a copy or representation of the actual droplet discharge process by discharging test droplets onto a detection object that replicates the substrate surface characteristics. This copying approach allows measurement and analysis of nozzle performance without requiring direct monitoring of the actual production substrate, simplifying the detection system design.

Inventive Principle:
Principle #26Copying

3Manufacturing precision

If nozzle information is ranked and corrected arrangement information is generated, then discharge defects are reduced, but processing time increases

Engineering Contradiction:
Improvedischarge defect reductionVSAvoidprocessing time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The system performs nozzle performance detection and arrangement information correction in advance before actual production begins. By pre-determining which nozzles have discharge defects and pre-generating corrected arrangement information, the system avoids time-consuming real-time adjustments during production, thereby reducing overall processing time while maintaining high precision.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system reduces discharge defects, ensures accurate and stable deposition of liquid material, and enhances the production yield of color filters and organic EL elements by adjusting nozzle operation parameters and selecting alternative nozzles for defective ones.

Implementation Method 1

discharging a liquid material including a functional material from a plurality of nozzles to a plurality of pixel regions on a substrate in synchronization with a relative movement of the substrate and the nozzles to form pixel formation elements

Methodology Applied
Scientific EffectDroplet discharge:

Implementation Method 2

an imaging mechanism for observing and capturing an image of the discharged droplets

Methodology Applied
Scientific EffectImage capture:

Implementation Method 3

The arrangement information generation unit is configured and arranged to generate second arrangement information in which the first arrangement information is corrected based on the nozzle information

Methodology Applied
Scientific EffectData processing and correction:

Data Source

PatentUS7762644B2Drawing system, liquid material drawing method, color filter manufacturing method, and organic EL element manufacturing method
Publication Date: 2010.07.27 TOKYO ELECTRON LTD
  • US7762644B2 patent drawing
  • US7762644B2 patent drawing
  • US7762644B2 patent drawing

AI summary

A drawing system for discharging a liquid material from a plurality of nozzles to a plurality of pixel regions on a substrate includes a memory unit, an arrangement information generation unit and a droplet discharge device. The memory unit is configured to store at least nozzle information in which the nozzles are ranked according to discharge characteristics and first arrangement information that indicates an arrangement of each of the nozzles with respect to each of the pixel regions in the relative movement. The arrangement information generation unit is configured to generate second arrangement information in which the first arrangement information is corrected based on the nozzle information. The droplet discharge device is configured to select one of the first arrangement information and the second arrangement information and to discharge droplets of the liquid material on each of the pixel regions from the nozzles according to the selected arrangement information.