Droplet Ejecting Apparatus Positional Deviation Correction

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Solution Overview

Problem

The existing droplet ejecting apparatuses face challenges in maintaining precise landing of droplets onto workpieces due to changes in temperature and time-related positional deviations between the droplet ejecting head and the workpiece, especially with the increasing size of workpieces and demand for high-definition products, which requires robust correction mechanisms to ensure accurate pattern drawing.

Innovation Solution

A droplet ejecting apparatus equipped with a workpiece table, a droplet ejecting head, a workpiece movement mechanism, a position detector, and a control unit that calculates positional deviations and corrects the droplet ejecting timing and movement to maintain precise landing, utilizing carriage marks and image capturing units to adjust and maintain the positional relationship.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the workpiece size increases to meet high-definition product demands, then the productivity and product quality improve, but the positional deviation between the droplet ejecting head and the workpiece increases due to temperature changes and time-related factors

Engineering Contradiction:
ImproveproductivityVSAvoidlanding precision
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent implements a feedback mechanism where the actual position of the droplet ejecting head is continuously detected during the ejecting operation, and this detected position information is fed back to the control unit. The control unit then calculates the positional deviation from the reference position and adjusts the ejecting timing accordingly, creating a closed-loop control system that maintains precision despite temperature changes and time-related deviations.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The patent dynamically changes the droplet ejecting timing parameter based on detected positional deviations. By adjusting the ejecting timing in real-time according to the actual head position, the system compensates for thermal expansion and time-related positional shifts, maintaining accurate landing positions even as operating conditions change during prolonged high-productivity operations.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the tolerance range for positional deviation is reduced to ±2 μm or less for high-definition products, then the manufacturing precision improves, but the difficulty of detecting and measuring the positional deviation increases

Engineering Contradiction:
Improvelanding precisionVSAvoiddetection difficulty
Core Design Contradiction:
Manufacturing precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent replaces complex mechanical measurement systems with an optical detection system. A position detector uses light to non-contactly measure the position of the droplet ejecting head with high precision, avoiding mechanical contact and wear while achieving the required measurement precision for ±2 μm tolerance ranges.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The position detector serves multiple functions: it detects the position of the droplet ejecting head, provides feedback to the control unit, and enables real-time compensation for positional deviations. This multi-functional component simplifies the overall system while achieving high measurement precision required for tight tolerance ranges.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Manufacturing precision

If the droplet ejecting head and workpiece are kept stationary relative to each other, then the manufacturing precision is maintained, but the productivity decreases due to the need for frequent repositioning and alignment

Engineering Contradiction:
Improvelanding precisionVSAvoidproductivity
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent transitions from a static alignment approach to a dynamic compensation approach. Instead of maintaining fixed relative positions through frequent repositioning, the system allows the droplet ejecting head to move dynamically during operation and uses real-time position detection and timing adjustment to compensate for these movements, enabling continuous operation without frequent interruptions for realignment.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The system performs preliminary positioning to establish an initial reference position, then uses continuous feedback and timing adjustment to maintain precision throughout the operation. This preliminary action combined with real-time compensation allows the system to achieve both high productivity through continuous operation and high precision through dynamic adjustment.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS11571706B2Droplet ejecting apparatus having carriage marks, droplet ejecting method, and computer storage medium
Publication Date: 2023.02.07 TOKYO ELECTRON LTD
  • US11571706B2 patent drawing
  • US11571706B2 patent drawing
  • US11571706B2 patent drawing

AI summary

A droplet ejecting apparatus includes a workpiece table configured to place a workpiece thereon, a droplet ejecting head configured to eject droplets onto the workpiece placed on the workpiece table, a Y-axis linear motor configured to move the workpiece table in a main scanning direction (Y-axis direction), a position detector configured to detect a position of a carriage mark, and a control unit configured to calculate the positional deviation amount in the main scanning direction between a detection position detected by the position detector and a reference position of the carriage mark and correct a droplet ejecting timing of the droplet ejecting head based on the positional deviation amount.