Droplet Ejecting Apparatus Position Correction Mechanism
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Solution Overview
Problem
In droplet ejecting apparatuses, positional deviations between the droplet ejecting head and the workpiece occur due to changes in posture, center of gravity, and linearity, especially with large and high-definition products, leading to precision issues during pattern drawing, particularly with increased tolerance ranges of ±2 μm or less.
Innovation Solution
A droplet ejecting apparatus with a workpiece table, a droplet ejecting head, and a movement mechanism, along with a control unit that detects positions and creates a correction table to align the droplet ejecting head and workpiece with high precision by correcting the relative position of the workpiece table, using reference marks and image capturing units to adjust for positional deviations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the workpiece table is moved in the sub-scanning direction during line break operations, then the entire surface of the workpiece can be covered, but positional deviations occur due to changes in posture, center of gravity, and linearity
Solution Approach 1:
The system performs preliminary measurement of the workpiece table position at multiple locations before the actual droplet ejection process. Based on these measurements, a correction table is created that stores positional deviation data. During line break operations, this pre-prepared correction table is referenced to compensate for positional deviations, allowing the system to maintain precision while covering the entire workpiece surface.
Solution Approach 2:
The system implements a feedback mechanism where the actual position of the workpiece table is measured and compared against the intended position. The detected deviations are used to generate correction values that are stored in a correction table. This feedback loop enables the system to continuously compensate for positional errors during line break operations, maintaining droplet placement precision across the entire workpiece area.
2Manufacturing precision
If high-definition pattern drawing is performed with tight tolerance ranges of ±2 μm or less, then pattern precision is improved, but positional deviations from posture and linearity changes become more significant
Solution Approach 1:
Before high-definition pattern drawing, the system performs preliminary positioning measurements at multiple locations on the workpiece table to detect any deviations in posture or linearity. A correction table is created based on these measurements, storing compensation values for each measured location. During the actual high-precision pattern drawing, these pre-calculated corrections are applied to maintain positioning reliability within the tight ±2 μm tolerance range.
Solution Approach 2:
The system dynamically adjusts positioning parameters by applying corrections from the correction table to compensate for posture and linearity changes. This parameter adjustment allows the system to maintain high positioning reliability even when physical deviations occur during line break operations, enabling consistent high-definition pattern drawing within tight tolerance ranges.
3Manufacturing precision
If a correction table is created to compensate for positional deviations, then droplet landing precision is improved, but measurement and detection complexity increases
Solution Approach 1:
The system divides the workpiece table surface into multiple discrete measurement locations. At each location, position measurements are taken independently and stored as separate correction values in the correction table. This segmentation approach simplifies the measurement process by breaking it into manageable discrete points, making it easier to detect and measure positional deviations without requiring complex continuous measurement systems.
Solution Approach 2:
The system creates a digital correction table that copies and stores the measured positional deviation data from the physical workpiece table. This digital representation allows the system to reference and apply corrections efficiently during droplet ejection without requiring complex real-time measurement systems. The correction table serves as a simplified digital model that captures the essential positional information needed for precision compensation.
Data Source
AI summary
Disclosed is droplet ejecting apparatus that ejects droplets of a functional liquid onto a workpiece to draw a pattern. The droplet ejecting apparatus includes: a workpiece table; a droplet ejecting head configured to eject the droplets onto the workpiece placed on the workpiece table; a movement mechanism configured to relatively move the workpiece table and the droplet ejecting head in a main scanning direction and a sub-scanning direction; and a control unit configured to: detect a position of the workpiece or a position of the workpiece table while relatively moving the workpiece table and the droplet ejecting head along a plurality of scanning lines extending in the main scanning direction and set side by side in the sub-scanning direction; and create, based on a detection result, a correction table that indicates a correlation between a position of the movement mechanism and a positional correction amount of the workpiece table.