Modular Droplet Generator Isolation for Fast EUV Nozzle Replacement
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Solution Overview
Problem
Current methods for replacing droplet generators in EUV lithography systems are time-consuming and labor-intensive, leading to significant downtime due to the need to cool and reload solid target material, which can result in nozzle clogging and reduced system efficiency.
Innovation Solution
A modularized vessel droplet generator assembly (MVDGA) with an isolation valve system that uses a pressure sensor and temperature adjustment module to rapidly isolate and replace droplet generators by solidifying the liquid fuel, allowing for quick decoupling and recoupling of components, thereby reducing downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional methods are used to replace droplet generators, then the replacement process is thorough and reliable, but the downtime is significant (hours)
Solution Approach 1:
The system is divided into modular components: the droplet generator assembly (DGA) can be independently isolated and replaced, while the main EUV system remains operational. The isolation valve creates a distinct service pathway that separates the replacement operation from the running system, enabling quick swapping of the DGA module without shutting down the entire system.
Solution Approach 2:
The isolation valve is pre-positioned and pre-configured in the service pathway before replacement is needed. The service pathway is prepared in advance with the valve already connected to the DGA, so when replacement is required, the isolation and swapping process can begin immediately without additional setup time.
2Ease of manufacture
If manual cooling and reloading of solid target material is performed, then the droplet generator can be maintained, but the process is labor-intensive and time-consuming
Solution Approach 1:
The manual mechanical process of cooling and reloading solid target material is replaced by an automated fluid-based system. Liquid fuel is pumped through the DGA via a service pathway, and the isolation valve uses fluid pressure to rapidly isolate and replace the DGA, eliminating the need for manual cooling and reloading operations.
Solution Approach 2:
The system changes the physical state of the target material from solid to liquid form. Instead of handling solid target material that requires cooling and manual reloading, the system uses liquid fuel that can be rapidly pumped and replaced through the service pathway, dramatically reducing maintenance time and labor requirements.
3Loss of time
If the droplet generator is quickly replaced without proper isolation, then downtime is reduced, but nozzle clogging may occur due to residual liquid fuel
Solution Approach 1:
The isolation valve extracts and removes the liquid fuel from the DGA by directing it through a dedicated service pathway away from the nozzle. This complete extraction prevents residual fuel from remaining in the nozzle, eliminating the risk of clogging while enabling rapid replacement of the DGA.
Solution Approach 2:
The service pathway acts as an intermediary channel between the DGA and the fuel supply system. It provides a separate route for liquid fuel to flow during replacement operations, isolating the nozzle from residual fuel while allowing rapid DGA swapping without compromising nozzle reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time required to replace droplet generators from hours to minutes, minimizing downtime and improving the efficiency of EUV lithography systems by enabling faster maintenance and replacement processes.
Implementation Method 1
the isolation valve is closed by solidifying the liquid fuel within the isolation valve, e.g., by beginning operation (e.g., turn on or starting) of a temperature adjustment module which decreases a temperature of the isolation valve causing the liquid fuel within the isolation valve to solidify
Implementation Method 2
The isolation valve is opened by warming the isolation valve which causes solidified fuel to liquefy within the isolation valve
Implementation Method 3
A pressure at (e.g., within, around, adjacent to the isolation valve, etc.) the isolation valve is monitored by a pressure sensor coupled to the isolation valve
Data Source
AI summary
The present disclosure is directed to a modularized vessel droplet generator assembly (MGDVA) including a droplet generator assembly (DGA). Under a normal operation, the liquid fuel moves along an operation pathway extending through the DGA to eject or discharge the liquid fuel (e.g., liquid tin) from a nozzle of the DGA into a vacuum chamber. The liquid fuel in the vacuum chamber is then exposed to a laser generating an extreme ultra-violet (EUV) light. Under a service operation, the operation pathway is closed and a service pathway extending through the DGA is opened. A gas is introduced into the service pathway forming a gas-liquid interface between the gas and the liquid fuel. The gas-liquid interface is driven to an isolation valve directly adjacent to the DGA. In other words, the gas pushes back the liquid fuel to the isolation valve. Once the gas-liquid interface reaches the isolation valve, the isolation valve is closed isolating the DGA from the liquid fuel.