Droplet Generator Pressure Control for Stable Target Droplet Chains
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Solution Overview
Problem
Existing plasma-based light sources face challenges in generating droplets of target material with regularity, alignment, and stability, as well as servicing the droplet generator.
Innovation Solution
A droplet generator system comprising an intermediate chamber, nozzle with a piezo-vibrator, skimmer, and gas interface, which controls the target material flow to form stable droplets, and a multi-stage skimmer to maintain droplet stability and alignment, using ambient gas to pressurize the intermediate chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Use of energy by moving object
If a droplet generator is used to produce target material droplets, then light generation capability is improved, but droplet stability and alignment deteriorate
Solution Approach 1:
An intermediate chamber is introduced between the droplet generation region and the vacuum chamber. This intermediate chamber serves as a mediator that allows droplets to be generated in a controlled pressure environment and then smoothly transitioned into the vacuum chamber, thereby maintaining droplet stability while enabling light generation.
Solution Approach 2:
The system is divided into distinct functional zones: a droplet generation region, an intermediate chamber, and a vacuum chamber. This segmentation allows each region to be optimized independently - the intermediate chamber can maintain conditions favorable for droplet stability while the vacuum chamber provides the environment needed for light generation.
2Stability of the object's composition
If ambient gas is pumped into the intermediate chamber to pressurize it, then droplet stability is improved, but gas flow disturbance increases
Solution Approach 1:
Gas inlet ports are positioned at specific locations within the intermediate chamber to create localized gas flow patterns. This allows the gas to be introduced in a controlled manner that pressurizes the chamber and stabilizes droplets without creating excessive flow disturbance that would affect droplet alignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances droplet stability and alignment by controlling the target material flow and using ambient gas to maintain chamber pressure, ensuring consistent droplet generation and reduced disturbance.
Implementation Method 1
a piezo-vibrator, wherein the nozzle inlet is configured to receive a target material as a target-material flow, wherein the target-material flow is configured to flow through the nozzle from the nozzle inlet to the nozzle orifice, wherein the piezo-vibrator is configured to vibrate the nozzle orifice and excite the target material passing through the nozzle orifice
Implementation Method 2
an ambient gas is configured to be pumped radially through the support ring via the gas interface and into the intermediate chamber, wherein the ambient gas is configured to pressurize the intermediate chamber
Implementation Method 3
the nozzle orifice is configured to eject the target material as a target-material jet into the intermediate chamber, wherein the target-material jet is configured to coalesce into a chain of target-material droplets
Data Source
AI summary
A droplet generator may form a stable chain of droplets. The droplet generator may enhance the stability of the chain of droplets using a nozzle, a multi-stage skimmer, and/or gas-distribution ring. The nozzle may include a nozzle orifice and filter which may control a target-material flow forming a jet and subsequently coalescing into droplets. The skimmer may include apertures and/or capillaries which are arranged axially along the path of the chain of droplets to skim off a flow of ambient gas. The gas-distribution ring may include a set of holes for even gas distribution, improving the flow of ambient gas within an intermediate chamber. The droplet generator may also include gas, electrical, pressure-sensor, and/or temperature-sensor interfaces. The droplet generator may also include clamps to connect the intermediate chamber with the nozzle and skimmer.