Droplet Positioning for Uniform Imprint Pattern Formation
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Solution Overview
Problem
Conventional imprint methods using templates with non-uniform pattern densities lead to local excess and deficiency of the transfer subject body, resulting in transcription deterioration due to uneven distribution of droplets.
Innovation Solution
A droplet positioning method that divides the face into smaller regions to determine the required amount and number of droplets, adjusts provisional positioning based on template contact form, and iteratively repositions droplets to achieve a target distribution of evaluation values, ensuring optimal droplet placement and uniform pattern formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a template with non-uniform pattern density is used in conventional imprint methods, then the template can form patterns, but local excess and deficiency of the transfer subject body occur causing transcription deterioration
Solution Approach 1:
The patent divides the template face into multiple regions (first regions) based on pattern density distribution. Each region is assigned a specific number of droplets, allowing localized control of transfer subject body amount according to the pattern density in that region. This segmentation resolves the contradiction by enabling uniform distribution despite non-uniform pattern density.
Solution Approach 2:
The patent applies different droplet allocation strategies to different regions of the template face. Regions with higher pattern density receive fewer droplets per unit area, while regions with lower density receive more droplets. This local quality adjustment ensures uniform transfer subject body distribution across the entire template, resolving the local excess and deficiency problem.
2Quantity of substance
If droplets are positioned without considering pattern density distribution, then the positioning process is simple, but local excess and deficiency of droplets occur
Solution Approach 1:
The patent performs preliminary division of the template face into multiple regions before droplet positioning. By pre-calculating the number of droplets required for each region based on pattern density, the system establishes a droplet allocation plan in advance. This preliminary action simplifies the actual positioning process while ensuring uniform droplet distribution.
Solution Approach 2:
The patent employs an iterative process where the number of droplets per region is calculated, droplets are positioned, and then the distribution is evaluated. If non-uniformity is detected, the process repeats with adjusted droplet allocation. This feedback mechanism achieves uniform droplet distribution while maintaining manageable process complexity through systematic iteration.
3Manufacturing precision
If the face is divided into smaller regions to control droplet amount, then droplet distribution uniformity improves, but the positioning process becomes more complex
Solution Approach 1:
The patent segments the template face into multiple regions based on pattern density characteristics. Each region is independently processed to determine the required number of droplets. This segmentation approach improves droplet placement precision by enabling region-specific control while managing complexity through systematic region processing.
Solution Approach 2:
The patent changes the parameter of region size and droplet count per region to optimize the balance between precision and complexity. By adjusting these parameters based on pattern density distribution, the system achieves precise droplet placement without excessive computational complexity in the positioning algorithm.
Data Source
AI summary
In general, according to one embodiment, a method is disclosed for a droplet positioning method.The method can include determining an amount of the droplet required in each of a first region, determining a total amount of the droplet, determining a total number of the droplets, determining a provisional positioning of the droplets based on a template contact form, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region. If the distribution of the evaluation values is out of the target range, a repositioning at least any of the droplets, redividing the face for forming the base body pattern again using the second regions, and determining an evaluation value for each second region are repeated until distribution of the evaluation values is in the target range.