Dry Dual-Scroll Vacuum Pump Eccentric Movable Disk Design
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Solution Overview
Problem
Current dry non-oil scroll vacuum pumps face challenges in optimizing design theory to improve vacuumizing performance, sealing, and heat balance while maintaining compactness and efficiency for emerging industries like semiconductor manufacturing.
Innovation Solution
A dry dual-scroll vacuum pump design featuring a dual-scroll structure with eccentrically arranged scroll teeth, a cooling circulation system, and anti-rotation assemblies to enhance vacuumizing rate, stability, and heat resistance, incorporating sealing grooves with elastic materials and balanced clump weights for improved performance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single-scroll structure is used, then the structure is simple, but the vacuumizing rate is limited
Solution Approach 1:
The patent divides the scroll structure into two separate scrolls (fixed scroll and movable scroll) that operate simultaneously. Each scroll has its own set of scroll teeth that work in parallel to compress gas, effectively doubling the pumping capacity compared to a single-scroll design while maintaining a relatively compact overall structure.
Solution Approach 2:
The patent combines two scroll compression mechanisms into a single integrated housing. The fixed scroll and movable scroll are positioned concentrically with shared sealing and support structures, merging two pumping functions into one unified device that achieves higher productivity without proportionally increasing device complexity.
2Productivity
If scroll teeth have high sliding speed, then the vacuumizing rate improves, but thermal deformation increases
Solution Approach 1:
The patent divides the high-speed compression function across two separate scroll mechanisms working in parallel. Each scroll operates at moderate sliding speeds while collectively achieving high vacuumizing rates, thereby reducing thermal deformation per scroll while maintaining overall productivity.
Solution Approach 2:
The patent modifies the operational parameters by distributing the compression workload across two scrolls, effectively halving the sliding speed requirement for each individual scroll while maintaining the same total gas throughput. This parameter change reduces frictional heating and thermal deformation.
3Productivity
If the movable disk is eccentrically arranged, then the inhalation volume increases, but the rotation inertia force increases
Solution Approach 1:
The patent uses two eccentrically arranged movable disks that rotate in opposite directions. The inertial forces generated by each disk counterbalance each other, reducing the net rotation inertia force on the housing while maintaining the inhalation volume benefits of eccentric arrangement.
Solution Approach 2:
The patent employs counterbalancing by arranging two movable disks with equal mass at opposite positions, rotating in opposite directions. The centrifugal forces and inertial moments generated by each disk act as counterweights to each other, canceling out the harmful vibration and instability caused by eccentric rotation.
4Reliability
If sealing grooves with elastic material are added, then the sealing performance improves, but the device complexity increases
Solution Approach 1:
The patent incorporates elastic sealing materials (such as rubber or polymer rings) within grooves on the scroll teeth surfaces. These flexible elements deform to maintain continuous contact between the scroll teeth and housing, creating effective sealing without requiring complex mechanical sealing structures.
Solution Approach 2:
The patent combines rigid scroll tooth structures with flexible sealing materials to create a composite sealing system. The rigid structure provides the mechanical strength and geometric precision, while the elastic material provides the sealing function, achieving high reliability without excessive complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design enhances vacuumizing performance, reduces thermal deformation, and improves stability and energy efficiency, achieving a more integrated, compact, and reliable vacuum pump operation.
Implementation Method 1
a cooling circulation system, and anti-rotation assemblies to enhance vacuumizing rate, stability, and heat resistance
Implementation Method 2
a tooth tip of each of the first scroll teeth and the second scroll teeth is provided with a sealing groove, and the sealing groove is internally provided with an elastic sealing material
Implementation Method 3
a movable disk is eccentrically arranged on the output shaft. Two groups of first scroll teeth that are centrally symmetrical are arranged on a side of the movable disk that faces the upper cover
Data Source
AI summary
A dry dual-scroll vacuum pump includes a driving assembly and an upper cover located above the driving assembly, wherein the driving assembly includes an output shaft, and a movable disk is eccentrically arranged on the output shaft; two groups of first scroll teeth that are centrally symmetrical are arranged on a side of the movable disk that faces the upper cover; a fixed disk is arranged at a lower end of the upper cover, second scroll teeth that are in one-to-one correspondence with the first scroll teeth are arranged on the fixed disk, and the first scroll teeth are meshed with the second scroll teeth to form a compression cavity; and the upper cover is further provided with an air inlet and an air outlet, which correspond to the compression cavity.