Dry-Etched Wavelength Conversion Matrix for High-Resolution Micro-LEDs
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Solution Overview
Problem
Current methods for manufacturing full-color Micro-LED displays using photoluminescent materials like phosphor or quantum dots face challenges such as poor display effect, low efficiency, and high complexity due to diffusion issues and alignment requirements, especially when increasing resolution and pixel density.
Innovation Solution
A manufacturing method involving a wavelength conversion matrix is developed, where a wavelength conversion layer is disposed on a substrate, masked, and then patterned using dry etching to form a matrix, improving resolution and display effect.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If photoluminescent materials such as phosphor or quantum dots are used for wavelength conversion, then full-color display can be realized, but display effect deteriorates due to diffusion issues and alignment problems
Solution Approach 1:
The wavelength conversion layer is divided into multiple discrete wavelength conversion units, each corresponding to a specific pixel. This segmentation prevents material diffusion between pixels and enables precise alignment with self-luminous pixels, resolving the contradiction between full-color display capability and display effect.
Solution Approach 2:
Different wavelength conversion materials are selectively placed in different regions corresponding to different pixel types (e.g., blue LEDs with yellow phosphor for green pixels, UV LEDs with red/green/blue quantum dots for full-color pixels). This local customization optimizes conversion efficiency and color accuracy for each pixel while maintaining overall display quality.
2Manufacturing precision
If resolution and pixel density are increased, then display quality improves, but manufacturing complexity increases due to alignment requirements
Solution Approach 1:
The wavelength conversion units are pre-formed on a substrate with precise positioning before being transferred to the final display structure. This preliminary preparation ensures accurate alignment with self-luminous pixels even at high resolutions, reducing manufacturing complexity during final assembly.
Solution Approach 2:
The wavelength conversion layer is formed as a complete matrix pattern that can be replicated across the entire display area. This copying approach maintains consistent alignment and quality across all pixels, enabling high-resolution displays without proportionally increasing manufacturing complexity.
3Ease of manufacture
If conventional manufacturing methods are used for wavelength conversion layer, then production is simpler, but resolution and conversion efficiency are limited
Solution Approach 1:
Conventional mechanical coating and alignment methods are replaced with dry etching processes that use plasma chemistry to precisely remove material and form wavelength conversion units. This substitution enables sub-micron resolution while maintaining manufacturing efficiency through batch processing.
Solution Approach 2:
The manufacturing process transitions from wet chemical methods to dry etching with controlled plasma parameters. By adjusting etching power, gas flow, and temperature, precise control over wavelength conversion unit dimensions is achieved, enabling high resolution while keeping the process manufacturable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method enhances the resolution and conversion efficiency of the wavelength conversion layer, enabling higher pixel density and improved display quality in Micro-LED displays.
Implementation Method 1
Each wavelength conversion layer of the at least one wavelength conversion layer is configured to superimpose a self-luminous pixel of a display to emit light with a set light wavelength
Implementation Method 2
removing a remaining part of the wavelength conversion layer except a part of the wavelength conversion layer protected by the mask through dry etching to form a wavelength conversion matrix
Data Source
AI summary
A wavelength conversion matrix includes: at least one wavelength conversion layer that is dry-etchable, where each wavelength conversion layer of the at least one wavelength conversion layer includes a mask area and a non-mask area, the non-mask area is a hollow area, the wavelength conversion layer is configured to superimpose a self-luminous pixel of a display to emit light with a set light wavelength. In the present disclosure, patterning of a wavelength conversion material may be realized by dry etching, thereby improving a resolution of the wavelength conversion matrix.