Integrated Dry Vacuum Pump Abatement Module
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Solution Overview
Problem
Conventional abatement systems for semiconductor manufacturing are large and fixed, making swap maintenance difficult, particularly due to the need to handle hazardous exhaust gases, which can precipitate or corrode, leading to downtime and safety concerns.
Innovation Solution
A dry vacuum pump with an integrated abatement module and direct flow path connection, allowing for easy swap maintenance and reducing the risk of gas leakage, while also optimizing the size and efficiency of the abatement process by eliminating the need for nitrogen dilution and heaters.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a conventional abatement system with long pipes and connecting members is used, then the exhaust gas can be guided to the abatement module, but the system becomes large and fixed, making swap maintenance difficult
Solution Approach 1:
The patent integrates the abatement module directly with the dry pump body, merging two previously separate components into a single unified structure. This eliminates the need for external pipes and connecting members, making the entire assembly compact and suitable for swap maintenance where the whole unit can be replaced as one module.
Solution Approach 2:
The invention segments the vacuum system into modular components where the abatement module is integrated with the dry pump as a replaceable unit. This segmentation allows the integrated module to be easily swapped out for maintenance without affecting the rest of the vacuum system, resolving the contradiction between system integration and maintenance ease.
2Temperature
If long pipes are used to connect the dry pump and abatement module, then the exhaust gas can be transported, but the temperature drops causing sublimation products to precipitate
Solution Approach 1:
By integrating the abatement module directly with the dry pump, the patent eliminates long transport pipes. The exhaust gas travels a minimal distance from the pump chamber to the abatement module, preventing temperature drop and sublimation product precipitation without requiring additional heating systems.
3Reliability
If a long pipe with connecting members is used, then the abatement module can be separate from the dry pump, but the risk of gas leakage increases
Solution Approach 1:
The patent merges the abatement module and dry pump into a single integrated unit with direct internal flow paths. This eliminates external pipes and multiple connecting members that could leak, significantly reducing gas leakage risk while maintaining the functional separation of pumping and abatement operations within the unified structure.
4Object-affected harmful factors
If nitrogen gas is introduced to dilute exhaust gas, then the exhaust gas concentration can be reduced, but operational costs increase
Solution Approach 1:
The patent extracts the dilution function by eliminating the need for nitrogen gas introduction. The integrated design allows exhaust gas to be directly processed in the abatement module without dilution, reducing operational costs associated with nitrogen gas consumption while effectively handling the exhaust gas concentration through direct abatement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables efficient detoxification of exhaust gases, reduces downtime, and enhances safety by simplifying maintenance, minimizing the risk of gas leakage, and reducing operational costs through direct connection and integrated design.
Implementation Method 1
an abatement module that detoxes the exhaust gas evacuated by the dry pump(s)
Data Source
Figure 1
Figure 1A
Figure 2A
AI summary
A dry vacuum pump with an abatement function includes: a dry pump (1) configured to evacuate exhaust gas from a tool (200) ; an abatement module (2) configured to detox the exhaust gas evacuated by the dry pump (1); and a flow path (3) configured to connect the dry pump (1) and the abatement module (2) directly to each other in an undetachable manner.