Dry Vacuum Pump Belt Drive Synchronization
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Solution Overview
Problem
Existing dry vacuum pumps, such as Roots pumps, face challenges in achieving synchronization of rotor shafts without lubrication, leading to inefficiencies and potential damage due to wear and tear, especially in applications where contamination is a concern, like in the semiconductor industry.
Innovation Solution
A dry vacuum pump design featuring a drive device with a smooth drive wheel and belt, along with toothed wheels on the rotor shafts that mesh but only engage when necessary for synchronization, eliminating the need for lubrication and allowing for automatic re-synchronization, thus preventing damage and maintaining efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If toothed wheels are used to transmit drive torque between rotor shafts, then automatic synchronization of rotor shafts is achieved, but lubrication is required which causes contamination of the evacuated vacuum chamber
Solution Approach 1:
The patent extracts the lubrication requirement from the toothed wheel transmission system by introducing a belt drive mechanism. The belt transmits drive torque from the drive shaft to the rotor shafts without requiring lubrication, thereby eliminating the contamination source while maintaining the synchronization function through the toothed wheels' engagement features.
Solution Approach 2:
The belt acts as an intermediary element between the drive shaft and the rotor shafts. It transfers mechanical power without direct contact between the toothed wheels, allowing synchronization to be maintained through the belt's tension and engagement features rather than through lubricated gear contact.
2Reliability
If toothed wheels are in permanent contact to transmit drive torque, then drive torque transmission is reliable, but wear and tear occurs requiring lubrication
Solution Approach 1:
The patent removes the lubrication requirement from the toothed wheel contact by using a belt-driven system. The belt provides the necessary torque transmission without creating the wear conditions that would require lubrication, thereby extending the service life of the toothed wheels and other components.
3Productivity
If rotor elements spacing is reduced to improve compression efficiency, then pump output increases, but synchronization precision requirements become more stringent
Solution Approach 1:
The patent uses the belt as a flexible transmission element that can accommodate minor variations in rotor spacing and synchronization. The belt's elasticity and tension adjustment capabilities allow the system to maintain adequate synchronization even with reduced rotor element spacing, without requiring extremely tight manufacturing tolerances.
Data Source
AI summary
The present invention concerns a dry vacuum pump comprising:a drive device (1) comprising a drive shaft (3) at one end of which is fixed at least one drive wheel (4) provided to set in motion at least one belt (5);at least two parallel rotors (7, 8) each having a shaft (9, 10) provided with a rotor element (11, 12), this shaft (9, 10) being able to be driven in rotation by the belt (5) and being equipped at one of its axial ends with a toothed wheel (13, 14),this pump having the special features that:the drive wheel (4) and the belt (5) are smooth;each shaft (9, 10) of the rotor (7, 8) comprises at least one smooth section (16, 17) arranged to co-operate with the belt (5), andthe toothed wheels (13, 14) of the shafts (9, 10) of the rotor (7, 8) are dimensioned and arranged to mesh with one another.


