Dry Vacuum Pump Liquid-Cooled Partition Cooling

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Solution Overview

Problem

Conventional dry vacuum pump apparatus with air cooling structures are large in size due to low cooling efficiency, and water cooling structures fail to efficiently cool the entire apparatus, hindering size reduction.

Innovation Solution

A dry vacuum pump apparatus with a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, featuring a coolant channel that circulates cooling water to efficiently cool high self-heating components like switching devices of the inverter, motor, and pump unit, allowing for a compact cooling structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If air cooling structure is used for cooling semiconductor switching devices, then cooling function is provided, but device size becomes large due to low cooling efficiency

Engineering Contradiction:
Improvecooling efficiencyVSAvoiddevice size
Core Design Contradiction:
TemperatureVSVolume of stationary object

Solution Approach 1:

The patent applies hydraulic cooling by introducing a liquid cooling system where coolant circulates through channels in the inverter housing and motor housing. This liquid cooling approach replaces air cooling, providing higher cooling efficiency and allowing for more compact device dimensions while effectively managing heat from semiconductor switching devices and motor windings.

Inventive Principle:
Principle #29Pneumatics and hydraulics

Solution Approach 2:

The cooling system is designed to serve multiple components simultaneously - the coolant circulation system cools both the inverter housing and motor housing through integrated cooling channels. This multi-functional cooling approach eliminates the need for separate cooling systems for different components, reducing overall device size while maintaining effective cooling.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Temperature

If water cooling structure is used to cool pump motor and pump casing, then cooling efficiency is improved, but entire apparatus is not efficiently cooled

Engineering Contradiction:
Improvecooling efficiencyVSAvoidcooling coverage
Core Design Contradiction:
TemperatureVSAdaptability or versatility

Solution Approach 1:

The cooling system is segmented into multiple independent cooling circuits: one for the inverter housing, one for the motor housing, and one for the pump unit. Each circuit can be optimized for its specific thermal requirements while using the same coolant circulation principle. This segmentation allows comprehensive cooling of all heat-generating components without compromising cooling efficiency.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A common coolant circulation system acts as an intermediary, distributing cooled coolant to multiple locations through separate channels. The coolant serves as a mediator that transfers heat from all major components (inverter, motor, pump) to the external environment, providing both comprehensive coverage and maintained efficiency.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Adaptability or versatility

If cooling structure is designed to cool all components, then comprehensive cooling is achieved, but device size increases

Engineering Contradiction:
Improvecooling coverageVSAvoiddevice size
Core Design Contradiction:
Adaptability or versatilityVSVolume of stationary object

Solution Approach 1:

The patent merges multiple cooling functions into a single integrated coolant circulation system. The cooling channels are built into the housing structures of the inverter, motor, and pump unit, eliminating the need for separate external cooling components. This consolidation provides comprehensive cooling coverage while minimizing the overall device volume.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The cooling channels are nested within the existing housing structures of the inverter and motor, utilizing the available space efficiently. The coolant circulation system is integrated inside the housing cavities rather than adding external cooling components, allowing comprehensive cooling without increasing the overall device envelope.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The liquid-cooled partition effectively absorbs heat from electronic components, enabling efficient cooling and reducing the overall size of the dry vacuum pump apparatus while minimizing heat absorption from the pump unit and preventing deposits on its inner surfaces.

Implementation Method 1

a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, and having a coolant circulating therein

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

having a coolant circulating therein

Methodology Applied
Scientific EffectConvection: Convection

Implementation Method 3

The coolant circulating in the liquid-cooled partition is effective to absorb heat generated by the control electronic circuit assembly

Methodology Applied
Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 4

a coolant channel defined therein for supplying a coolant initially to the liquid-cooled partition and then from the liquid-cooled partition to the motor and then to the pump unit

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentEP2378122B1Dry vacuum pump apparatus and method of cooling the same
Publication Date: 2017.09.27 EBARA CORP
  • EP2378122B1 patent drawingFigure 1~2
  • EP2378122B1 patent drawingFigure 3A~3B
  • EP2378122B1 patent drawingFigure 4

AI summary

A dry vacuum pump apparatus is small in size as it includes a highly efficient cooling unit for cooling, with a coolant such as cooling water, large-current circuit components of high self-heating value, typically switching devices of an inverter. The dry vacuum pump apparatus includes a dry vacuum pump including a pump unit and a motor for actuating the pump unit, an inverter for converting AC power from an AC power supply into AC power having a predetermined frequency and supplying the AC power to the motor, an electric equipment enclosure accommodating therein a control electronic circuit assembly including the inverter, a pump enclosure accommodating therein the dry vacuum pump and an operation monitoring sensor of the dry vacuum pump, a liquid-cooled partition interposed between the electric equipment enclosure and the pump enclosure, and having a coolant circulating therein, and an external enclosure housing therein the electric equipment enclosure, the pump enclosure, and the liquid-cooled partition as an integral structure.