Drying Apparatus Marangoni Force Pattern Collapse

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Solution Overview

Problem

Existing drying processes for substrates with uneven patterns face challenges in preventing pattern collapse due to surface tension differences in liquid films, leading to uneven drying and potential defects.

Innovation Solution

A drying apparatus utilizing a temperature difference between a first heat transfer part and a second heat transfer part to control the surface tension distribution of a liquid film, employing a Marangoni force to manage the agglomeration and prevent liquid from remaining in recesses of the pattern, thereby suppressing pattern collapse.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a liquid film is used to cover the substrate surface for drying, then the substrate can be dried, but the liquid film may agglomerate due to surface tension differences causing pattern collapse

Engineering Contradiction:

Improvepattern integrityVSAvoidsurface tension-induced agglomeration

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The invention changes the temperature parameter of the heat transfer part to create a controlled temperature difference across the substrate surface. This temperature gradient induces a Marangoni force that counteracts the harmful surface tension effects, preventing liquid film agglomeration and pattern collapse during drying

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The invention replaces conventional mechanical drying methods with a thermal field-based approach. By applying a temperature difference to generate Marangoni force, the system uses thermal-mechanical coupling to control liquid film behavior instead of relying on mechanical agitation or external forces that could disrupt the pattern

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Productivity

If conventional drying methods are used, then drying can be performed, but pattern collapse occurs due to uneven liquid film distribution

Engineering Contradiction:

Improvedrying efficiencyVSAvoidpattern uniformity

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

By adjusting the temperature parameter of the heat transfer part, the invention creates a controlled thermal environment that generates Marangoni force. This force drives uniform liquid film distribution across the substrate surface, maintaining pattern precision while achieving efficient drying

Inventive Principle:

Principle #35Parameter changes

Solution Approach 2:

The invention introduces a temperature difference field as an intermediary mechanism. This thermal field mediates between the liquid film and the substrate, using Marangoni convection to achieve uniform liquid distribution and prevent pattern collapse without direct mechanical intervention

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The controlled surface tension and temperature differences ensure uniform drying, reducing the risk of pattern collapse and shortening processing time by using the Marangoni force instead of external forces, maintaining the integrity of the substrate's uneven pattern.

Implementation Method 1

a first heat transfer part whose temperature is adjusted to a first temperature, wherein a first heat is transferred between the first heat transfer part and the substrate by a first temperature difference; a second heat transfer part whose temperature is adjusted to a second temperature different from the first temperature, wherein a second heat is transferred between the second heat transfer part and the substrate by a second temperature difference

Methodology Applied

Scientific EffectHeat transfer: Conduction (thermal)

Implementation Method 2

a controller configured to control the first temperature and the second temperature and to control a surface tension distribution of the liquid film so as to control an agglomeration of the liquid film

Methodology Applied

Scientific EffectMarangoni effect: Marangoni Effect

Data Source

PatentUS11515182B2Drying apparatus, substrate processing system, and drying method

Publication Date: 2022.11.29 TOKYO ELECTRON LTD

AI summary

There is provided a drying apparatus for covering an upper surface of the substrate with an uneven pattern formed thereon with a liquid film and subsequently drying the substrate, including: a first heat transfer part whose temperature is adjusted to a first temperature, wherein a first heat is transferred between the first heat transfer part and the substrate by a first temperature difference; a second heat transfer part whose temperature is adjusted to a second temperature different from the first temperature, wherein a second heat is transferred between the second heat transfer part and the substrate by a second temperature difference; and a controller configured to control the first temperature and the second temperature and to control a surface tension distribution of the liquid film so as to control an agglomeration of the liquid film.