Drying Module Liquid Curtain Prevents Particle Contamination
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Solution Overview
Problem
The existing substrate drying module contaminates the drying tank with flying particles when drying the substrate holder, as dry gas sprayed by nozzles also dries the holder, causing particles to attach and re-attach to the tank's inner surface, leading to contamination and potential re-deposition on subsequent substrates.
Innovation Solution
A drying module that includes a drying tank with a liquid supply system and gas supply system, where nozzles spray gas to the substrate holder while the liquid supply port supplies liquid to the tank's inner surface, capturing floating particles and preventing re-attachment to the tank or holder.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If dry gas is sprayed by nozzles to dry the substrate holder, then the substrate holder is dried, but particles fly and attach to the inner surface of the drying tank causing contamination
Solution Approach 1:
A liquid curtain is introduced as an intermediary substance between the sprayed gas and the tank walls. The liquid curtain captures particles that would otherwise attach to the tank inner surface, preventing contamination while allowing the gas to continue drying the substrate holder effectively
Solution Approach 2:
The liquid curtain converts the harmful effect of flying particles into a beneficial filtration mechanism. Particles that would cause contamination are instead captured by the liquid, which then drains away, effectively removing particles from the system
2Object-generated harmful factors
If particles attach to the inner surface of the drying tank, then the tank becomes contaminated, but the particles may fly again and attach to another substrate or holder
Solution Approach 1:
The liquid curtain is supplied in advance during the drying process to prevent particles from attaching to the tank walls in the first place. This preliminary action eliminates the need for subsequent cleaning operations and prevents re-contamination cycles
Solution Approach 2:
The liquid curtain serves as a continuous intermediary barrier that intercepts particles before they can attach to the tank surface, ensuring particles are removed from the environment rather than temporarily stored on surfaces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively removes particles from the drying tank during substrate holder drying, preventing contamination and re-deposition on other substrates or holders by ensuring the liquid captures particles in the gas, maintaining a cleaner tank environment.
Implementation Method 1
The liquid can capture the particles floating in the gas by contacting the gas in the inside of the drying tank
Implementation Method 2
the plurality of nozzles are configured such that they are located at a position facing a substrate to spray a dry gas such as an N2 gas or air toward a surface of the substrate
Implementation Method 3
the dry gas sprayed to the substrate is splashed also to the substrate holder holding the substrate, the substrate drying module also dries the substrate holder
Data Source
AI summary
A drying module 300 according to the present disclosure includes a drying tank 320 having a wall 322, a liquid supply port 334 for supplying liquid to an inner surface of the wall 322 and an outlet 336, a plurality of nozzles 340 for spraying a gas to a substrate holder 200, a liquid supply system 312 which supplies the liquid from the liquid supply port 334 to the inside of the drying tank 320, a gas supply system 310 which supplies the gas to the plurality of nozzles 340, and a control module 380. The control module 380 controls the liquid supply system 312 and the gas supply system 310 such that the plurality of nozzles 340 sprays the gas to the substrate holder 200 or a substrate W while the liquid supply port 334 supplies the liquid to the inner surface of the wall 322.