DSP Chain for Microlithography Measurement Processing
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Solution Overview
Problem
Microlithographic projection exposure apparatuses face challenges in efficiently processing rapid sequences of measurement values, particularly in systems with multi-mirror arrays and faceted mirrors, where accurate and real-time adjustment of optical components is crucial for high-quality imaging, but existing systems struggle with the complexity and speed required for precise regulation.
Innovation Solution
A processing unit comprising a chain of digital signal processors that efficiently processes measurement values by distributing and forwarding them through the chain, allowing each processor to handle only a fraction of the data within a specific time frame, enabling real-time processing and regulation of optical components such as multi-mirror arrays.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single processing unit processes all measurement values, then processing completeness is ensured, but processing speed and real-time capability deteriorate due to the large volume of data
Solution Approach 1:
The patent divides the measurement data processing into multiple segments by distributing different portions of measurement values to different digital signal processors in a processing chain. Each processor handles a specific fraction of the total measurement data, enabling parallel processing while maintaining overall processing completeness through the chained architecture.
2Productivity
If multiple digital signal processors are used to increase processing capacity, then processing speed improves, but system complexity increases
Solution Approach 1:
The patent combines multiple digital signal processors into a unified processing chain where processors are connected in sequence. This merging approach allows parallel processing capability while presenting a unified interface to the external system, reducing the apparent complexity through integrated architecture design.
Solution Approach 2:
Each digital signal processor in the chain is designed with universal functionality to handle measurement data reception, processing, and forwarding. This multi-functionality reduces overall system complexity by using identical or similar processor modules rather than specialized components for each function.
3Loss of time
If each digital signal processor handles only a fraction of measurement values, then real-time processing capability improves, but measurement precision may deteriorate due to distributed processing
Solution Approach 1:
The processing chain implements feedback mechanisms where each digital signal processor receives control parameters and measurement data, processes its fraction of data, and forwards results along the chain. The chained architecture ensures that processing results from all segments are combined, maintaining overall measurement precision while achieving real-time processing through distributed computation.
Data Source
AI summary
A microlithographic projection exposure apparatus has a measuring device, by which a sequence of measurement values can be generated, and a processing unit for processing the measurement values. The processing unit has a processing chain which includes a plurality of digital signal processors. The first digital signal processor in the processing chain is connected to the measuring device to receive the sequence of measurement values. Each subsequent digital signal processor in the processing chain is connected to a respectively preceding digital signal processor in the processing chain. The digital signal processors are programmed so that each digital signal processor processes only a fraction of the measurement values and generates processing results therefrom, and forwards the remaining fraction of the measurement values to the respective next digital signal processor in the processing chain for processing.